玻璃上硅纳米薄膜的光子特性及其制备

2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2006-01-01 DOI:10.1109/NEMS.2006.334909

Simiao Xiao, Guangbo Li, Fan Wang, Xiaoqing Jiang, Ming-hua Wang, Jianyi Yang

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引用次数: 1

摘要

首先分析了玻璃上硅(SOG)纳米薄膜的光子特性，指出了纳米光子学需要SOG纳米薄膜的原因。建立了用于纳米光子学应用的玻璃上硅纳米薄膜材料的制备方法。采用阳极焊接和选择性蚀刻。然后对sog基纳米薄膜进行了研究。

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Photonic Properties of Silicon-on-Glass Nano-Films and its Fabrication

The photonic properties of the silicon-on-glass (SOG) nano-films are analyzed first and the reason why SOG nano-films are required for the nanophotonics is pointed. Then the method to fabricate silicon-on-glass nano-film materials for the applications of nano photonics is established. Anodic boning and selective etching are employed. SOG-based nano-films are then studied.

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2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems

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