氦脉冲纳秒放电中的电子能量学

B. Yee, J. Foster, B. Weatherford, E. Barnat
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引用次数: 0

摘要

只提供摘要形式。脉冲,纳秒放电(PNDs)以其大体积和非热性质而闻名。大体积对材料加工具有吸引力,非热电子可用于驱动反应,而气体或衬底加热最小。然而,这种等离子体的随机性给模拟带来了挑战,而短时间尺度和大场限制了实验诊断。这导致了pnd的电子能量学有一定程度的不确定性,特别是当非局域电子效应变得重要时。这种不确定性也抑制了pnd的预测能力。这项工作考察了氦PND的居群动力学,并利用它们来推断有关电子能量学的结论。具体地说,用激光吸收光谱法测量了绝对三重态亚稳密度。这些密度与氦等离子体的全球模型结合使用来预测等离子体的发射。将这些发射与测量的等离子体发射进行比较。由于该方法假设了电子的局部性,因此两者之间的一致程度应反映该假设的准确性。结果在电子能量学的背景下进行了讨论,并与PIC-MCC模拟的初步结果进行了比较。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Electron energetics in a helium pulsed nanosecond discharge
Summary form only given. Pulsed, nanosecond discharges (PNDs) are notable for their large volumes and nonthermal nature. The large volume is attractive for material processing and the nonthermal electron can be used to drive reactions with minimal gas or substrate heating. However, the stochasticity of such plasmas presents a challenge for simulations, while the short time scales and large fields limit experimental diagnostics. This has led to a degree of uncertainty in the electron energetics of PNDs, particularly when nonlocal electron effects become important. This uncertainty also inhibits the predictive capabilities for PNDs. This work examines the population kinetics of a helium PND, and uses them to infer conclusions about the electron energetics. Specifically, the absolute triplet metastable densities are measured with laser-absorption spectroscopy. These densities are used in combination with a global model of a helium plasma to predict plasma emissions. These emissions are compared with the measured plasma emissions. As this method assumes electron locality, the degree of agreement between the two should reflect the accuracy of this assumption. The results are discussed in the context of the electron energetics, and compared to preliminary results of PIC-MCC simulations.
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