铌酸锂和石英的纵向泄漏表面声波研究

X. Tong, D. Zhang, Y. Li, Y. Shui
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引用次数: 2

摘要

高频SAW换能器在手机、卫星通信等领域显示出巨大的生命力。利用基于高速声波模式的声表面波器件是提高工作频率和保持带材尺寸不变的重要途径之一。因此,准纵声表面漏波的研究具有重要的应用价值。本文给出了LiNbO/sub 3/和石英的理论和实验结果,例如,在欧拉角范围内(0/spl°/,/spl β /, 90/spl°/),LiNbO/sub 3/的理论速度在6000 ~ 7000 m/s之间,几乎是普通表面波的两倍,但压电耦合系数变化在0.14% ~ 0.5%之间,远小于表面波。以欧拉角(0/spl°/、38/spl°/、90/spl°/)下的LiNbO/ sub3 /为例,实验结果与理论结果吻合较好。本文还给出了石英在欧拉角(0/spl度/、124/spl度/、/spl伽马/)范围内的理论结果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Investigation of longitudinal leaky surface acoustic wave on lithium niobate and quartz
The high frequency SAW transducers have shown great vitality in mobile phone and satellite communications and so on. One of the important ways to raise the working frequency and keeping the size of strips unchanged is to utilize the SAW devices based on high velocity acoustic wave modes. Therefore, the investigation of quasi-longitudinal acoustic surface leaky waves (QLASLWs) is of great significant because of its potential applications. Both theoretical and experimental results on LiNbO/sub 3/ and quartz are shown in this paper, for example, on LiNbO/sub 3/ in the range of Euler angles (0/spl deg/, /spl beta/, 90/spl deg/), the theoretical velocities are between 6000 m/s and 7000 m/s, nearly about twice that of normal surface waves, but the piezoelectric coupling coefficients varies between about 0.14% to 0.5%, much less than that of surface waves. The experimental results, for example, on LiNbO/sub 3/ at Euler angle (0/spl deg/, 38/spl deg/, 90/spl deg/), shows well agreement with the theoretical results. The theoretical results on quartz in the range of Euler angle (0/spl deg/, 124/spl deg/, /spl gamma/) are also shown in this paper.
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