{"title":"完全兼容CMOS-SOI低功耗定向流量传感器","authors":"J. Laconte, B. Rue, J. Raskin, D. Flandre","doi":"10.1109/ICSENS.2004.1426307","DOIUrl":null,"url":null,"abstract":"The paper reports an improved low cost directional flow sensor, fully compatible with IC-CMOS SOI (silicon-on-insulator) processes, with fair sensitivity and short response time on a large airflow rate range (from 0 to 8 m/s) at a very low consumption (15 mW). Many different sensing principles can be found in the literature and impose a difficult choice between low power consumption, high airflow rate range, sufficient flow rate sensitivity and compatibility with IC processes. Our sensor challenges most recent realizations by providing attractive trade-offs between these parameters for a large range of applications.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":"26 1","pages":"864-867 vol.2"},"PeriodicalIF":0.0000,"publicationDate":"2004-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"10","resultStr":"{\"title\":\"Fully CMOS-SOI compatible low-power directional flow sensor\",\"authors\":\"J. Laconte, B. Rue, J. Raskin, D. Flandre\",\"doi\":\"10.1109/ICSENS.2004.1426307\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The paper reports an improved low cost directional flow sensor, fully compatible with IC-CMOS SOI (silicon-on-insulator) processes, with fair sensitivity and short response time on a large airflow rate range (from 0 to 8 m/s) at a very low consumption (15 mW). Many different sensing principles can be found in the literature and impose a difficult choice between low power consumption, high airflow rate range, sufficient flow rate sensitivity and compatibility with IC processes. Our sensor challenges most recent realizations by providing attractive trade-offs between these parameters for a large range of applications.\",\"PeriodicalId\":20476,\"journal\":{\"name\":\"Proceedings of IEEE Sensors, 2004.\",\"volume\":\"26 1\",\"pages\":\"864-867 vol.2\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2004-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"10\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of IEEE Sensors, 2004.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2004.1426307\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of IEEE Sensors, 2004.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2004.1426307","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The paper reports an improved low cost directional flow sensor, fully compatible with IC-CMOS SOI (silicon-on-insulator) processes, with fair sensitivity and short response time on a large airflow rate range (from 0 to 8 m/s) at a very low consumption (15 mW). Many different sensing principles can be found in the literature and impose a difficult choice between low power consumption, high airflow rate range, sufficient flow rate sensitivity and compatibility with IC processes. Our sensor challenges most recent realizations by providing attractive trade-offs between these parameters for a large range of applications.