完全兼容CMOS-SOI低功耗定向流量传感器

Proceedings of IEEE Sensors, 2004. Pub Date : 2004-01-01 DOI:10.1109/ICSENS.2004.1426307

J. Laconte, B. Rue, J. Raskin, D. Flandre

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引用次数: 10

摘要

本文报道了一种改进的低成本定向流量传感器，完全兼容IC-CMOS SOI(绝缘体上硅)工艺，在非常低的功耗(15 mW)下，在大气流速率范围内(从0到8 m/s)具有相当的灵敏度和短的响应时间。在文献中可以找到许多不同的传感原理，并且在低功耗，高气流速率范围，足够的流量灵敏度和与IC工艺的兼容性之间施加了困难的选择。我们的传感器通过为大范围的应用提供这些参数之间有吸引力的权衡来挑战最新的实现。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Fully CMOS-SOI compatible low-power directional flow sensor

The paper reports an improved low cost directional flow sensor, fully compatible with IC-CMOS SOI (silicon-on-insulator) processes, with fair sensitivity and short response time on a large airflow rate range (from 0 to 8 m/s) at a very low consumption (15 mW). Many different sensing principles can be found in the literature and impose a difficult choice between low power consumption, high airflow rate range, sufficient flow rate sensitivity and compatibility with IC processes. Our sensor challenges most recent realizations by providing attractive trade-offs between these parameters for a large range of applications.

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来源期刊

Proceedings of IEEE Sensors, 2004.

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