工业条件下磁控溅射MoS2固体润滑涂层的微观结构、力学性能和摩擦学行为

Armin Seynstahl, Sebastian Krauß, E. Bitzek, B. Meyer, B. Merle, S. Tremmel
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引用次数: 19

摘要

在工业应用中沉积二硫化钼涂层需要在PVD磁控溅射过程中旋转样品。在这里,我们展示了3倍的基底旋转,沿着沉积单元给出的较大的目标-基底距离,在涂层内部引入孔隙。机械性能和磨损行为与孔隙度密切相关,而孔隙度又取决于基体的温度和转速。球盘磨损试验和纳米压痕磨损试验表明,摩擦摩擦学行为发生了一致的变化;首先,多孔结构的压实占主导地位,其次是压实材料的磨损。压实是磨合过程中体积损失的主要原因。与没有基材旋转的致密涂层相比,初始多孔涂层表现出较低的硬度和明显的磨合行为。摩擦寿命试验表明,压实后的润滑性能良好。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Microstructure, Mechanical Properties and Tribological Behavior of Magnetron-Sputtered MoS2 Solid Lubricant Coatings Deposited under Industrial Conditions
Depositing MoS2 coatings for industrial applications involves rotating the samples during the PVD magnetron sputtering process. Here, we show that a 3-fold substrate rotation, along a large target–substrate distance given by the deposition unit, introduces porosity inside the coatings. The mechanical properties and wear behavior strongly correlate with the degree of porosity, which, in turn, depends on the temperature and the rotational speed of the substrate. Ball-on-disk tests and nanoindentation wear experiments show a consistent change in tribological behavior; first, a compaction of the porous structure dominates, followed by wear of the compacted material. Compaction was the main contributor to the volume loss during the running-in process. Compared to a dense coating produced without substrate rotation, the initially porous coatings showed lower hardness and a distinct running-in behavior. Tribological lifetime experiments showed good lubrication performance after compaction.
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