{"title":"用于标准CMOS/BiCMOS的铁磁射频电感器和变压器","authors":"Y. Zhuang, M. Vroubel, B. Rejaei, J. Burghartz","doi":"10.1109/IEDM.2002.1175882","DOIUrl":null,"url":null,"abstract":"Integrated solenoidal radio-frequency (RF) inductors and transformers with a ferromagnetic core are demonstrated by using a fully IC-compatible fabrication process. For a 500-nm-thick Ni/sub 80/Fe/sub 20/ film, a cut-off frequency of over 7.5 GHz for a 2.5-nH inductor is realized. Optimum inductor design based on tailored inductance, quality factor, and cut-off frequency is discussed. RF transformers realized have a coupling factor of /spl sim/70% up to 200 MHz.","PeriodicalId":74909,"journal":{"name":"Technical digest. International Electron Devices Meeting","volume":"12 3","pages":"475-478"},"PeriodicalIF":0.0000,"publicationDate":"2002-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1109/IEDM.2002.1175882","citationCount":"45","resultStr":"{\"title\":\"Ferromagnetic RF inductors and transformers for standard CMOS/BiCMOS\",\"authors\":\"Y. Zhuang, M. Vroubel, B. Rejaei, J. Burghartz\",\"doi\":\"10.1109/IEDM.2002.1175882\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Integrated solenoidal radio-frequency (RF) inductors and transformers with a ferromagnetic core are demonstrated by using a fully IC-compatible fabrication process. For a 500-nm-thick Ni/sub 80/Fe/sub 20/ film, a cut-off frequency of over 7.5 GHz for a 2.5-nH inductor is realized. Optimum inductor design based on tailored inductance, quality factor, and cut-off frequency is discussed. RF transformers realized have a coupling factor of /spl sim/70% up to 200 MHz.\",\"PeriodicalId\":74909,\"journal\":{\"name\":\"Technical digest. International Electron Devices Meeting\",\"volume\":\"12 3\",\"pages\":\"475-478\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-12-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1109/IEDM.2002.1175882\",\"citationCount\":\"45\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Technical digest. International Electron Devices Meeting\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IEDM.2002.1175882\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Technical digest. International Electron Devices Meeting","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.2002.1175882","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Ferromagnetic RF inductors and transformers for standard CMOS/BiCMOS
Integrated solenoidal radio-frequency (RF) inductors and transformers with a ferromagnetic core are demonstrated by using a fully IC-compatible fabrication process. For a 500-nm-thick Ni/sub 80/Fe/sub 20/ film, a cut-off frequency of over 7.5 GHz for a 2.5-nH inductor is realized. Optimum inductor design based on tailored inductance, quality factor, and cut-off frequency is discussed. RF transformers realized have a coupling factor of /spl sim/70% up to 200 MHz.
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