{"title":"离子注入表面层研究中的声表面波","authors":"S. Joneliunas, L. Pranevichius, R. Valatka","doi":"10.1016/0029-554X(81)90807-7","DOIUrl":null,"url":null,"abstract":"<div><p>Surface acoustic waves (SAW) have been used in the present work to study changes of mechanical properties of surface layers during ion implantation. The SAW propagation velocity is measured during implantation as a function of implanted ion type and dose. The possibility of travelling SAW visualization to study the formation of macroscopic clusters in the implanted surface layers is demonstrated.</p></div>","PeriodicalId":100971,"journal":{"name":"Nuclear Instruments and Methods","volume":"182 ","pages":"Pages 761-767"},"PeriodicalIF":0.0000,"publicationDate":"1981-04-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0029-554X(81)90807-7","citationCount":"6","resultStr":"{\"title\":\"Surface acoustic waves in the study of ion implanted surface layers\",\"authors\":\"S. Joneliunas, L. Pranevichius, R. Valatka\",\"doi\":\"10.1016/0029-554X(81)90807-7\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>Surface acoustic waves (SAW) have been used in the present work to study changes of mechanical properties of surface layers during ion implantation. The SAW propagation velocity is measured during implantation as a function of implanted ion type and dose. The possibility of travelling SAW visualization to study the formation of macroscopic clusters in the implanted surface layers is demonstrated.</p></div>\",\"PeriodicalId\":100971,\"journal\":{\"name\":\"Nuclear Instruments and Methods\",\"volume\":\"182 \",\"pages\":\"Pages 761-767\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1981-04-15\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/0029-554X(81)90807-7\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Nuclear Instruments and Methods\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/0029554X81908077\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nuclear Instruments and Methods","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/0029554X81908077","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Surface acoustic waves in the study of ion implanted surface layers
Surface acoustic waves (SAW) have been used in the present work to study changes of mechanical properties of surface layers during ion implantation. The SAW propagation velocity is measured during implantation as a function of implanted ion type and dose. The possibility of travelling SAW visualization to study the formation of macroscopic clusters in the implanted surface layers is demonstrated.
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