用平面干涉仪检测立方体直角误差的方法

Q4 Physics and Astronomy

光学技术 Pub Date : 2014-01-01 DOI:10.3788/GXJS20144003.0286

刘树民 Liu Shumin

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引用次数: 1

摘要

介绍了一种用平面干涉仪测量立方体直角误差的方法。激光干涉仪测量方法精度高、灵敏度高。制作立方体方位夹具，保证测量光在立方体内反射后能从入射平面射出。当出射光与平行测量光重合时，形成干涉，用平面干涉仪测量立方体直角errorsΔ90°。同时，还可以判断立方体的表面平整度、玻璃的缺陷等指标。该方法等效于棱镜透镜干涉仪在立方体中的直角误差测量。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Detection method for the cube right angle errors with plane interferometer

A method for measuring cube right angle errors with planar interferometer is introduced.Laser interferometer measurement method has high precision and high sensitivity.A cube bearing fixture is fabricated to ensure the measuring light can outgo from the incident plane after reflection in the cube.When the outgoing light coincides with parallel measuring light,interference is formed and cube right angle errorsΔ90°are measured with planar interferometer.Meanwhile,indicators such as surface flatness of the cube and defects in the glass can also be judged at the same time.The method equates to prism lens interferometer in the cube right angle errors measuring.

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来源期刊

光学技术 Physics and Astronomy-Atomic and Molecular Physics, and Optics

CiteScore

0.60

自引率

0.00%

发文量

6699

期刊介绍： The predecessor of Optical Technology was Optical Technology, which was founded in 1975. At that time, the Fifth Ministry of Machine Building entrusted the School of Optoelectronics of Beijing Institute of Technology to publish the journal, and it was officially approved by the State Administration of Press, Publication, Radio, Film and Television for external distribution. From 1975 to 1979, the magazine was named Optical Technology, a quarterly with 4 issues per year; from 1980 to the present, the magazine is named Optical Technology, a bimonthly with 6 issues per year, published on the 20th of odd months. The publication policy is: to serve the national economic construction, implement the development of the national economy, serve production and scientific research, and implement the publication policy of "letting a hundred flowers bloom and a hundred schools of thought contend".