基于傅里叶合成技术的光刻照明系统研究

{"title":"基于傅里叶合成技术的光刻照明系统研究","authors":"李辉 Li Hui, 吴晓斌 Wu Xiaobin, 韩晓泉 Han Xiaoquan, 马赫 Ma He, 沙鹏飞 Sha Pengfei","doi":"10.3788/cjl221221","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":67323,"journal":{"name":"Chinese Journal of Lasers","volume":"1 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2023-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"基于傅里叶合成技术的光刻照明系统研究\",\"authors\":\"李辉 Li Hui, 吴晓斌 Wu Xiaobin, 韩晓泉 Han Xiaoquan, 马赫 Ma He, 沙鹏飞 Sha Pengfei\",\"doi\":\"10.3788/cjl221221\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":67323,\"journal\":{\"name\":\"Chinese Journal of Lasers\",\"volume\":\"1 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Chinese Journal of Lasers\",\"FirstCategoryId\":\"1089\",\"ListUrlMain\":\"https://doi.org/10.3788/cjl221221\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Chinese Journal of Lasers","FirstCategoryId":"1089","ListUrlMain":"https://doi.org/10.3788/cjl221221","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}