激光精密加工。准分子激光器在精密微加工中的应用。

{"title":"激光精密加工。准分子激光器在精密微加工中的应用。","authors":"I. Miyamoto","doi":"10.2493/JJSPE.65.1560","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":39804,"journal":{"name":"Journal of the Japan Society for Precision Engineering","volume":"65 1","pages":"1560-1565"},"PeriodicalIF":0.0000,"publicationDate":"1999-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Precision Processing by Laser. Application of Excimer Lasers to Precision Microfabrication.\",\"authors\":\"I. Miyamoto\",\"doi\":\"10.2493/JJSPE.65.1560\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":39804,\"journal\":{\"name\":\"Journal of the Japan Society for Precision Engineering\",\"volume\":\"65 1\",\"pages\":\"1560-1565\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1999-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of the Japan Society for Precision Engineering\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.2493/JJSPE.65.1560\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"Engineering\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of the Japan Society for Precision Engineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.2493/JJSPE.65.1560","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"Engineering","Score":null,"Total":0}