纳米铁陶瓷薄膜的软磁性能

IEEE Translation Journal on Magnetics in Japan Pub Date : 1994-09-01 DOI:10.1109/TJMJ.1994.4565928

S. Furukawa;S. Ohnuma;F. Matsumoto;H. Fujimori;T. Masumoto

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引用次数: 8

摘要

采用共溅射法制备了Fe-M-（O，F）（M=Si，Mg，Y，Zr，Ca，Al）薄膜。这些薄膜具有由直径为50至100Å的精细金属颗粒和陶瓷状边界组成的网状结构。由bec-Fe晶粒组成的薄膜在沉积态具有软磁性和低磁致伸缩性。它们的磁导率具有良好的频率响应，这似乎是由于高电阻边界减少了涡流损耗。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Soft Magnetic Properties of Nanocrystalline Fe-Ceramic Films

Fe-M-(O,F) (M=Si, Mg, Y, Zr, Ca, Al) films were prepared by co-sputtering of Fe and ceramic targets. These films have a network-like structure consisting of fine metallic grains of diameter 50 to 100 Å and ceramic-like boundaries. Those films that consist of bec Fe grains have soft magnetic properties and low magnetostriction in the as-deposited state. Their permeability has good frequency response, which seems to be attributable to the reduction of eddy current losses by the highly resistive boundaries.

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IEEE Translation Journal on Magnetics in Japan

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