薄膜体声波谐振器的建模与梯形滤波器设计

IF 0.6 4区材料科学 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY

Journal of Optoelectronics and Advanced Materials Pub Date : 2007-09-01 DOI:10.1142/9789812770165_0037

Y. Chen

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引用次数: 1

摘要

本文利用PSPICE对薄膜体声谐振器(FBAR)的特性进行建模和仿真。提出了声传输线和梅森模型的类比等效电路，并采用控源方法将其转换为PSPICE模型。讨论了压电材料及其厚度、电极材料、电极面积及其厚度等物理参数对FBAS性能的影响。最后，我们实现了FBAR，设计了一个中心频率为1.1 GHz，带宽约为60.9%的梯形滤波器。研究结果表明，PSPICE是FBAR建模和梯形滤波器设计的有效工具。

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Modeling of thin film bulk acoustic wave resonators and ladder-type filter design

In this paper, PSPICE is implemented to model and simulate the characteristic of thin film bulk acoustic resonator (FBAR). Both analogy equivalent circuits of Acoustic transmission line and Mason model is proposed and transferred to the PSPICE model by using the controlled-source method. The physical parameters such as piezoelectric materials and its thickness, electrode material, area and its thickness affecting the properties of the FBAS are discussed. Finally, we have implemented the FBAR to design a ladder type filter with a center frequency at 1.1 GHz and bandwidth about 60.9%. The study results in that PSPICE is an effective tool for the FBAR modeling and ladder type filter design.

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来源期刊

Journal of Optoelectronics and Advanced Materials 工程技术-材料科学：综合

CiteScore

0.90

自引率

20.00%

发文量

审稿时长

6.5 months

期刊介绍： The Journal of Optoelectronics and Advanced Materials (J. Optoelectron. Adv. M.) appears with 12 issues per year and publishes papers in the field of optoelectronics, photonics, and new advanced materials (nonlinear optical materials, crystalline and non-crystalline materials, nano-structured materials, magnetic materials, functional and smart materials, materials based on polymers, biomaterials) of relevance for optoelectronics and photonics.