聚焦激光束在半导体材料中产生光热波的研究

IF 2.4 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY
I. Abbas, K. Aly
{"title":"聚焦激光束在半导体材料中产生光热波的研究","authors":"I. Abbas, K. Aly","doi":"10.1142/S2251237316500039","DOIUrl":null,"url":null,"abstract":"In this work, the theory of coupled plasma, thermal and elastic waves were used to investigate the wave propagation on semiconductor material during photo-thermo-elastic process. A thin slim strip (TSS) medium, elastic semiconductor with isotropic and homogeneous thermal and elastic properties have been considered. The plasma, thermal and elastic waves in a TSS photo generated by a focused and intensity modulated laser beam were analyzed. Laplace transform techniques and eigenvalue approach were used to obtain the analytical solutions for carrier density, displacement, temperature, and stress. Numerical computations have been carried out on silicon-like semiconductor material. The results are presented graphically to show the effect of the coupling between the plasma, thermal, and elastic waves.","PeriodicalId":16406,"journal":{"name":"Journal of Molecular and Engineering Materials","volume":"04 1","pages":"1650003"},"PeriodicalIF":2.4000,"publicationDate":"2016-11-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1142/S2251237316500039","citationCount":"7","resultStr":"{\"title\":\"A Study on Photothermal Waves in a Semiconductor Material Photogenerated by a Focused Laser Beam\",\"authors\":\"I. Abbas, K. Aly\",\"doi\":\"10.1142/S2251237316500039\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this work, the theory of coupled plasma, thermal and elastic waves were used to investigate the wave propagation on semiconductor material during photo-thermo-elastic process. A thin slim strip (TSS) medium, elastic semiconductor with isotropic and homogeneous thermal and elastic properties have been considered. The plasma, thermal and elastic waves in a TSS photo generated by a focused and intensity modulated laser beam were analyzed. Laplace transform techniques and eigenvalue approach were used to obtain the analytical solutions for carrier density, displacement, temperature, and stress. Numerical computations have been carried out on silicon-like semiconductor material. The results are presented graphically to show the effect of the coupling between the plasma, thermal, and elastic waves.\",\"PeriodicalId\":16406,\"journal\":{\"name\":\"Journal of Molecular and Engineering Materials\",\"volume\":\"04 1\",\"pages\":\"1650003\"},\"PeriodicalIF\":2.4000,\"publicationDate\":\"2016-11-28\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1142/S2251237316500039\",\"citationCount\":\"7\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Molecular and Engineering Materials\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1142/S2251237316500039\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Molecular and Engineering Materials","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1142/S2251237316500039","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 7

摘要

本文利用等离子体、热波和弹性波耦合理论研究了光热弹性过程中半导体材料上的波传播。研究了一种具有各向同性和均匀热弹性特性的薄条状介质弹性半导体。分析了聚焦和强度调制激光束产生的TSS光中的等离子体波、热波和弹性波。利用拉普拉斯变换技术和特征值法得到载流子密度、位移、温度和应力的解析解。对类硅半导体材料进行了数值计算。结果用图形表示了等离子体波、热波和弹性波之间耦合的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A Study on Photothermal Waves in a Semiconductor Material Photogenerated by a Focused Laser Beam
In this work, the theory of coupled plasma, thermal and elastic waves were used to investigate the wave propagation on semiconductor material during photo-thermo-elastic process. A thin slim strip (TSS) medium, elastic semiconductor with isotropic and homogeneous thermal and elastic properties have been considered. The plasma, thermal and elastic waves in a TSS photo generated by a focused and intensity modulated laser beam were analyzed. Laplace transform techniques and eigenvalue approach were used to obtain the analytical solutions for carrier density, displacement, temperature, and stress. Numerical computations have been carried out on silicon-like semiconductor material. The results are presented graphically to show the effect of the coupling between the plasma, thermal, and elastic waves.
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来源期刊
Journal of Molecular and Engineering Materials
Journal of Molecular and Engineering Materials MATERIALS SCIENCE, MULTIDISCIPLINARY-
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