恒应力作用下硅悬臂梁的原位变形与温度的关系

{"title":"恒应力作用下硅悬臂梁的原位变形与温度的关系","authors":"M. Gan, Yang Zhang, V. Tomar","doi":"10.1115/1.4027877","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":73845,"journal":{"name":"Journal of nanotechnology in engineering and medicine","volume":"33 1","pages":"021004"},"PeriodicalIF":0.0000,"publicationDate":"2014-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1115/1.4027877","citationCount":"10","resultStr":"{\"title\":\"In Situ Deformation of Silicon Cantilever Under Constant Stress as a Function of Temperature\",\"authors\":\"M. Gan, Yang Zhang, V. Tomar\",\"doi\":\"10.1115/1.4027877\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":73845,\"journal\":{\"name\":\"Journal of nanotechnology in engineering and medicine\",\"volume\":\"33 1\",\"pages\":\"021004\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1115/1.4027877\",\"citationCount\":\"10\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of nanotechnology in engineering and medicine\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1115/1.4027877\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of nanotechnology in engineering and medicine","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1115/1.4027877","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}