光纤的CVD:倾斜光纤Bragg光栅作为实时传感平台

David J. Mandia, Wenjun Zhou, Jacques Albert, Seán T. Barry
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引用次数: 7

摘要

倾斜光纤布拉格光栅(TFBG)作为一种多功能和强大的工具,用于许多传感应用,特别是气相沉积过程,进行了综述。本文对近年来利用TFBG作为光学探针监测贵金属单源前驱体的金属-有机(MO)CVD的工作进行了广泛的讨论。这项工作还建立了广泛的范围,利用tfbg和其他光纤配置来询问薄膜生长和相关的光学性质。虽然它不可能涵盖关于TFBG器件的全部应用范围,但本文重点介绍了基于TFBG的CVD传感的最新进展,以及TFBG作为瞬变场基传感器的适用性的进展。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

CVD on Optical Fibers: Tilted Fiber Bragg Gratings as Real-time Sensing Platforms

CVD on Optical Fibers: Tilted Fiber Bragg Gratings as Real-time Sensing Platforms

The tilted fiber Bragg grating (TFBG), as a versatile and robust tool for many sensing applications with a particular focus on vapor deposition processes, is reviewed. Recent work employing the TFBG as an optical probe for monitoring the metal-organic (MO)CVD of noble-metal, single-source precursors is discussed extensively. This work also establishes the broad scope that utilizes TFBGs and other optical fiber configurations to interrogate thin film growth and the associated optical properties. While it cannot possibly cover the full scope of applications with respect to the TFBG device, this review highlights the recent advances of TFBG-based sensing for CVD, and progress towards the applicability of TFBGs as evanescent field-based sensors.

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来源期刊
Chemical Vapor Deposition
Chemical Vapor Deposition 工程技术-材料科学:膜
自引率
0.00%
发文量
0
审稿时长
>12 weeks
期刊介绍: Chemical Vapor Deposition (CVD) publishes Reviews, Short Communications, and Full Papers on all aspects of chemical vapor deposition and related technologies, along with other articles presenting opinion, news, conference information, and book reviews. All papers are peer-reviewed. The journal provides a unified forum for chemists, physicists, and engineers whose publications on chemical vapor deposition have in the past been spread over journals covering inorganic chemistry, materials chemistry, organometallics, applied physics and semiconductor technology, thin films, and ceramic processing.
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