HFCVD沉积微晶金刚石的表征

Q3 Engineering
Tao Zhang, Feng Qin, Qian Wanghuan, Lijun Zhang, F. Sun
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引用次数: 1

摘要

根据中国常规金刚石粉体工业标准(JB/T7990-2012),对采用晶种和自成核方法制备的CVD微晶金刚石粉体的粒度组成、晶体形态和金刚石纯度等性能进行了评价。检测结果表明,种子上生长的80%以上的颗粒呈立方八面体,表面光滑,没有明显的生长缺陷,而由于存在10%-23%的自发颗粒(0.5~1.2μm),它们很难满足相应的商业粒度组成要求。对于通过自成核法沉积的粉末,颗粒尺寸组成与行业标准定义的模型非常一致,70.5%的晶体表现出立方八面体或二十面体的形态,并且由于不希望的二次成核,它们的表面质量比在种子上生长的晶体差一些。此外,通过显微拉曼光谱检测,这两种类型的CVD粉末具有高纯度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Characterisation of microcrystalline diamonds deposited by HFCVD
The performances of CVD microcrystalline diamond powders by the seeding and self-nucleation method, including the particle size composition, crystal morphology, and diamond purity, are evaluated by the China industry standard of conventional diamond powders (JB/T 7990-2012). The detection results show over 80% particles grown on the seeds exhibit a cubo-octahedral with smooth surfaces and no obvious growth defects, while they can hardly meet the corresponding commercial requirements of particle size composition due to the existence of 10%-23% spontaneous particles (0.5~1.2 μm). For the powders deposited by self-nucleation method, the particle size composition agrees well with the model defined by the industry standard, and 70.5% crystals exhibit the cubo-octahedral or icosahedron morphology, as well as their surface quality are little worse than those grown on the seeds due to unwanted secondary nucleation. Besides, the two types of CVD powders have a high purity detected by micro-Raman spectroscopy.
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来源期刊
International Journal of Abrasive Technology
International Journal of Abrasive Technology Engineering-Industrial and Manufacturing Engineering
CiteScore
0.90
自引率
0.00%
发文量
13
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