Chemical catalysts of Fenton reaction for single-crystal SiC based on nanoindentation

Aiming at production of single-crystal SiC for chemical mechanical polishing, Fenton reaction, and catalytic efficiency of FeSO4, Fe2(SO4)3, FeO, Fe3O4, and Fe2O3 were studied. The mechanical properties are obtained by nanoindentation experiments. Different catalysts can promote Fenton reaction, and all reaction layers formed with the same chemical composition, atomic structure, and hardness at 1.5 GPa. When Fe3O4 was used as catalyst in Fenton reaction, the effect was optimal because its hardness and modulus remained low. After 2 min, the thickness of reaction layer had reached 200 nm, which can fully meet requirements of CMP. Fenton reaction depends on ability of catalyst to ionise Fe2+. The higher concentration of Fe2+, the higher concentration of OH, and the faster reaction rate of SiC surface material.