基于亚波长光栅波导的片上长波红外气体传感器

IF 1.1 4区物理与天体物理 Q4 NANOSCIENCE & NANOTECHNOLOGY

Journal of Nanophotonics Pub Date : 2023-07-01 DOI:10.1117/1.JNP.17.036011

Jie Liao, Dong Zhang, Yuefeng Wang, Pengjun Wang, Qiang Fu, Shixun Dai, Weiwei Chen, Lingxiao Ma, Jun Li, T. Dai, Jianyi Yang

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引用次数: 0

摘要

摘要提出了一种基于亚波长光栅波导的长波红外片上气体传感器。通过优化光栅结构参数，将相应的慢光区与甲烷的吸收光谱重叠，可以大大提高光气相互作用，从而获得优异的传感性能。所设计的波导气体传感器工作波长为7.70 μm，对应于低波长红外中的甲烷吸收峰，具有7.514的高慢光增强因子。相关灵敏度和检出限分别为26.54393和0.1327 ppm。

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On-chip long-wave infrared gas sensor based on subwavelength grating waveguide

Abstract. A long-wave infrared (LWIR) on-chip gas sensor based on subwavelength grating waveguide is proposed. By optimizing the grating structural parameters, the corresponding slow-light region is overlapped with the absorption spectrum of methane, which can greatly improve the light–gas interaction to achieve excellent sensing performance. The presented waveguide gas sensor is designed to operate at the wavelength of 7.70 μm, which corresponds to the methane absorption peak in the LWIR and exhibits a high slow-light enhancement factor of 7.514. The related sensitivity and limit of detection are, respectively, 26.54393 and 0.1327 ppm.

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来源期刊

Journal of Nanophotonics 工程技术-光学

CiteScore

2.60

自引率

6.70%

发文量

审稿时长

3 months

期刊介绍： The Journal of Nanophotonics publishes peer-reviewed papers focusing on the fabrication and application of nanostructures that facilitate the generation, propagation, manipulation, and detection of light from the infrared to the ultraviolet regimes.