离子诱导表面图案的稳定性和对称性

Christopher S. R. Matthes, Nasr M. Ghoniem, Daniel Walgraef
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引用次数: 2

摘要

我们提出了一个离子诱导表面图案化的连续模型。该模型包含了原子溅射、再沉积和表面扩散过程,并显示了非线性动力学阻尼Kuramoto-Sivashinsky (KS)方程的一般特征。演化方程的线性和非线性稳定性分析给出了新出现的图案波长和空间对称性的估计。利用快速傅立叶变换方法对演化方程进行数值模拟,验证了解析理论的正确性,并给出了入射离子角、通量和衬底表面温度的影响。结果表明,大的局部几何变化导致进化方程的二次非线性,在长时间尺度上支配着模式选择和稳定性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Stability and symmetry of ion-induced surface patterning

Stability and symmetry of ion-induced surface patterning

We present a continuum model of ion-induced surface patterning. The model incorporates the atomic processes of sputtering, re-deposition and surface diffusion, and is shown to display the generic features of the damped Kuramoto-Sivashinsky (KS) equation of non-linear dynamics. Linear and non-linear stability analyses of the evolution equation give estimates of the emerging pattern wavelength and spatial symmetry. The analytical theory is confirmed by numerical simulations of the evolution equation with the Fast Fourier Transform method, where we show the influence of the incident ion angle, flux, and substrate surface temperature. It is shown that large local geometry variations resulting in quadratic non-linearities in the evolution equation dominate pattern selection and stability at long time scales.

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期刊介绍: Journal of Materials Science: Materials Theory publishes all areas of theoretical materials science and related computational methods. The scope covers mechanical, physical and chemical problems in metals and alloys, ceramics, polymers, functional and biological materials at all scales and addresses the structure, synthesis and properties of materials. Proposing novel theoretical concepts, models, and/or mathematical and computational formalisms to advance state-of-the-art technology is critical for submission to the Journal of Materials Science: Materials Theory. The journal highly encourages contributions focusing on data-driven research, materials informatics, and the integration of theory and data analysis as new ways to predict, design, and conceptualize materials behavior.
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