{"title":"不同Al金属电极介质膜的制备及性能研究","authors":"Qi Dong, Shao-Long Zhong, Qi-Kun Feng, Ming-Sheng Zheng, Jiang-Bo Ping, Zhi-Min Dang","doi":"10.1049/nde2.12037","DOIUrl":null,"url":null,"abstract":"<p>Al electrodes with different thickness (sheet resistance 2–100 Ω/□) were deposited onto the films of polypropylene (PP), polyester (PET) and polyimide (PI) by vacuum evaporation. The root-mean-square (RMS) and peak-to-valley roughness of Al electrodes were characterised by atomic force microscopy (AFM). It was found that the PET and PI substrates showed the reduced threshold thickness of the continuous growth of Al electrodes compared with the PP substrate. The sheet resistance of Al electrodes decreases with the increase of peak-to-valley roughness. The current surge capability of the Al electrode decreases with the increase of RMS roughness. The Al electrode deposited on the PET film has higher sheet resistance and better current carrying capability, and the self-healing performance of metallised film is also excellent among three kinds of films.</p>","PeriodicalId":36855,"journal":{"name":"IET Nanodielectrics","volume":"5 3-4","pages":"125-131"},"PeriodicalIF":3.8000,"publicationDate":"2022-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ietresearch.onlinelibrary.wiley.com/doi/epdf/10.1049/nde2.12037","citationCount":"2","resultStr":"{\"title\":\"Preparation and properties of different dielectric films with Al metal electrode\",\"authors\":\"Qi Dong, Shao-Long Zhong, Qi-Kun Feng, Ming-Sheng Zheng, Jiang-Bo Ping, Zhi-Min Dang\",\"doi\":\"10.1049/nde2.12037\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>Al electrodes with different thickness (sheet resistance 2–100 Ω/□) were deposited onto the films of polypropylene (PP), polyester (PET) and polyimide (PI) by vacuum evaporation. The root-mean-square (RMS) and peak-to-valley roughness of Al electrodes were characterised by atomic force microscopy (AFM). It was found that the PET and PI substrates showed the reduced threshold thickness of the continuous growth of Al electrodes compared with the PP substrate. The sheet resistance of Al electrodes decreases with the increase of peak-to-valley roughness. The current surge capability of the Al electrode decreases with the increase of RMS roughness. The Al electrode deposited on the PET film has higher sheet resistance and better current carrying capability, and the self-healing performance of metallised film is also excellent among three kinds of films.</p>\",\"PeriodicalId\":36855,\"journal\":{\"name\":\"IET Nanodielectrics\",\"volume\":\"5 3-4\",\"pages\":\"125-131\"},\"PeriodicalIF\":3.8000,\"publicationDate\":\"2022-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://ietresearch.onlinelibrary.wiley.com/doi/epdf/10.1049/nde2.12037\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IET Nanodielectrics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://onlinelibrary.wiley.com/doi/10.1049/nde2.12037\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IET Nanodielectrics","FirstCategoryId":"1085","ListUrlMain":"https://onlinelibrary.wiley.com/doi/10.1049/nde2.12037","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Preparation and properties of different dielectric films with Al metal electrode
Al electrodes with different thickness (sheet resistance 2–100 Ω/□) were deposited onto the films of polypropylene (PP), polyester (PET) and polyimide (PI) by vacuum evaporation. The root-mean-square (RMS) and peak-to-valley roughness of Al electrodes were characterised by atomic force microscopy (AFM). It was found that the PET and PI substrates showed the reduced threshold thickness of the continuous growth of Al electrodes compared with the PP substrate. The sheet resistance of Al electrodes decreases with the increase of peak-to-valley roughness. The current surge capability of the Al electrode decreases with the increase of RMS roughness. The Al electrode deposited on the PET film has higher sheet resistance and better current carrying capability, and the self-healing performance of metallised film is also excellent among three kinds of films.
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