银薄膜的固态脱湿:自组装纳米几何结构

M. T. Sultan, A. Manolescu, H. Svavarsson, Á. Valfells
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引用次数: 1

摘要

用原子力显微镜和扫描电子显微镜分析了在N2环境下退火的银(Ag)薄膜的固态脱湿动力学。考虑了退火参数(即温度和时间)和Ag膜厚度的变化,以确定它们对Ag膜固态脱湿的影响。观察到了从纳米孔到亚稳纳米环存在的几种形态演变。已经确定,在高温(≥900°C)和/或时间(≥2小时)下退火的结构导致亚稳纳米环的形成,并且其几何方面和数量随着膜厚度的增加而增加。简要介绍了该结构在硅纳米线阵列和光电发射体制造中的可能应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Solid-state dewetting of silver-thin films: self-assembled nano-geometries
The study presents the dynamics of solid-state dewetting of silver (Ag)-film annealed in N2 ambient, analyzed by atomic force microscopy and scanning electron microscopy. Varying the annealing parameters (i.e. temperature and time) and Ag-film thicknesses were taken into account, to determine their effect over the solid-state dewetting of Ag-films. Several morphological evolutions from nanohole to the presence of metastable nanorings were observed. It was determined that structures annealed at high temperature (≥900 °C) and/or time (≥2 h) results in formation of metastable nanorings and whose geometrical aspects and population grew with increasing film thickness. Possible applications of the structures for fabrication of silicon nanowire arrays and photo-emitters are briefly described.
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