Ceramic multilayer technology as a platform for miniaturized sensor arrays for water analysis

Abstract. Ion-selective electrodes (ISEs) have been proven particularly useful in water analysis. They are usually used as single-rod measuring chains in different designs, which are manufactured using precision mechanical manufacturing and assembling technologies. The paper describes a microsystem technology approach for the fabrication of miniaturized electrochemical sensors. The ceramic HTCC (high-temperature co-fired ceramic) and LTCC (low-temperature co-fired ceramic) multilayer technology enables suitable processes for the manufacturing of robust and miniaturized sensor arrays with a high functional density. Design, manufacture, and electrochemical performance of the novel ceramic multilayer-based sensor array are presented in the paper using various examples. An adapted material and process development was carried out for the sensitive functional films. Special thick-film pastes for the detection of the pH value as well as NH 4 + , K+ , Ca2+ , and Cu2+ ion concentrations in aqueous solutions were developed. Ion-sensitive thick-film membranes were deposited on a ceramic multilayer sensor platform by means of screen-printing. All ISEs, integrated in the sensor array, showed suitable electrochemical performances including a very quick response (several seconds) combined with a high sensitivity (exhibiting Nernstian behaviour) in the tested measuring range. The obtained sensitivities were around 57  mVper decade : for the pH sensor, 30  mVper decade for calcium, 53  mVper decade for potassium, and 57  mVper decade for ammonium. Depending on the application, different sensitive electrodes on the ceramic sensor array can be combined as required.