基于压电换能器的微泵建模、振动分析与制造

IF 0.8 4区工程技术 Q4 ACOUSTICS

International Journal of Acoustics and Vibration Pub Date : 2020-09-30 DOI:10.20855/ijav.2020.25.31670

Yanfang Guan, Xiangxin Meng, Yansheng Liu, Mingyang Bai, Fengqian Xu

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引用次数: 4

摘要

通过有限元分析，讨论了不同直径压电换能器耦合前后的参数和振动特性。结果表明，压电换能器的振动稳定性随驱动频率的增加而降低。根据自由振动和强迫振动条件下（与泵体密封前后）的振动测量，PZT的最大位移随频率的变化在不同的驱动条件下显示出相同的趋势。强迫振动下的最大位移小于自由振动下的位移。在自由振动和强迫振动下，最大位移与换能器的直径成反比，与驱动电压成正比。具有扩散器/喷嘴微阀的微泵是用不同的PZT外径设计和制造的。最后，测量了微泵的流量和压力，与振动结果一致。此外，在方波驱动信号下，最大位移较大，其次是正弦波信号，然后是三角波信号。对于外径为12mm的PZT，在100Vpp的正弦波驱动电压下，最大流速和压力值分别为150μl/min和346Pa。

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Modeling, Vibration Analysis and Fabrication of Micropumps Based on Piezoelectric Transducers

The parametric and vibrational characteristics of PZTs (Piezoelectric Transducers) with different diameters before and after coupling are discussed by finite element analysis. It is shown that the vibration stability of the piezoelectric transducer decreases with increasing driving frequency. The PZT’s variation of maximum displacement with frequency shows the same trend for different driving conditions according to vibration measurement under conditions of both free and forced vibration (before and after sealing with the pump body). The maximum displacement under forced vibration is less than that under free vibration. The maximum displacement is inversely proportional to the diameter of the transducer and directly proportional to the driving voltage under both free and forced vibration. Micropumps with diffuser/nozzle microvalves are designed and fabricated with different external diameters of the PZTs. Finally, the flow rate and pressure of the micropumps are measured, which are consistent with the vibrational results. Moreover, the maximum displacement is larger under a square-wave driving signal, followed by a sine-wave signal, and then a triangle-wave signal. For a PZT with an external diameter of 12 mm, the maximum flow rate and pressure value are 150 μl/min and 346 Pa, respectively, under sine-wave driving at 100 Vpp driving voltage.

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来源期刊

International Journal of Acoustics and Vibration ACOUSTICS-ENGINEERING, MECHANICAL

CiteScore

1.60

自引率

10.00%

发文量

审稿时长

12 months

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