用于表面染色检测和成像的空气耦合压电微机械超声换能器

IF 3.5 3区工程技术 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering Pub Date : 2022-03-01 DOI:10.1063/10.0009632

Sheng Sun, Jianyuan Wang, Yuan Ning, Menglun Zhang

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引用次数: 0

摘要

提出了一种用于表面污渍检测和成像的空气耦合压电微机械超声换能器(PMUT)。设计、制作了508 kHz PMUT阵列，并对其电学和声学特性进行了表征，并将其用于脉冲回波验证测试。成功地演示了金属块上污渍的成像。与现有的光学染色检测方法相比，该方法可以在没有颜色要求的黑暗环境中工作。这项工作为小型染色检测系统的发展提供了一条新的、有前途的途径。

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Air-coupled piezoelectric micromachined ultrasonic transducers for surface stain detection and imaging

This paper proposes an air-coupled piezoelectric micromachined ultrasonic transducer (PMUT) for detection and imaging of surface stains. A 508 kHz PMUT array is designed, fabricated, and characterized in terms of its electrical and acoustic properties, and it is used in a pulse echo validation test. Imaging of stains on metal blocks is successfully demonstrated. Compared with existing optical methods for stain detection, the proposed approach can work in a dark environment without color requirements. This work provides a new and promising route for the development of miniaturized stain detection systems.

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