液相透射电镜电化学芯片的设计与制造。

IF 1.5 4区工程技术 Q3 MICROSCOPY

Microscopy Pub Date : 2022-05-04 DOI:10.1093/jmicro/dfac023

Y. Sasaki, Ayako Mizushima, Y. Mita, Kaname Yoshida, A. Kuwabara, Y. Ikuhara

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引用次数: 0

摘要

液相透射电子显微镜（LP-TEM）可以与电化学芯片（e-chip）一起使用，原位观察液体中的电化学反应。使用微机电系统（MEMS）技术制造的电子芯片上的电极设计不容易改变。在此，我们报道了一种新设计的电子芯片及其制造工艺。通过使用荫罩在我们的电子芯片上进行额外的真空沉积步骤，用各种金属制造出具有所需形状的电极。为了精确控制LP-TEM中的电化学反应，电极形状和材料的优化至关重要。

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Design and Fabrication of an Electrochemical Chip for Liquid-Phase Transmission Electron Microscopy.

Liquid-phase transmission electron microscopy (LP-TEM) can be used with an electrochemical chip (e-chip) to observe electrochemical reactions in a liquid in situ. The design of electrodes on an e-chip fabricated using microelectromechanical system (MEMS) technology cannot be easily changed. Here, we report a newly designed e-chip and its fabrication process. Electrodes with a desired shape were fabricated with various metals via an additional step of vacuum deposition onto our e-chip with a shadow mask. For precise control of the electrochemical reactions in LP-TEM, optimization of the electrode shape and material is critical.

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来源期刊

Microscopy Physics and Astronomy-Instrumentation

CiteScore

3.30

自引率

11.10%

发文量

期刊介绍： Microscopy, previously Journal of Electron Microscopy, promotes research combined with any type of microscopy techniques, applied in life and material sciences. Microscopy is the official journal of the Japanese Society of Microscopy.