密集等离子体的极紫外线辐射源

IF 1.7 Q3 PHYSICS, ATOMIC, MOLECULAR & CHEMICAL

Atoms Pub Date : 2023-08-31 DOI:10.3390/atoms11090118

K. Bergmann

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引用次数: 1

摘要

致密和热等离子体的概念可以用来在软x射线和极紫外光谱范围内建立强大而明亮的辐射源。这种光源用于纳米级成像和结构应用，例如半导体工业中的EUV光刻。了解产生光的原子过程和等离子体内的辐射传输是优化的必要条件。介绍了使用脉冲激光或气体放电产生等离子体的基本原理和技术概念，并在简化原子物理模型的框架内概述了电离动力学的关键方面。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Extreme Ultraviolet Radiation Sources from Dense Plasmas

The concept of dense and hot plasmas can be used to build up powerful and brilliant radiation sources in the soft X-ray and extreme ultraviolet spectral range. Such sources are used for nanoscale imaging and structuring applications, such as EUV lithography in the semiconductor industry. An understanding of light-generating atomic processes and radiation transport within the plasma is mandatory for optimization. The basic principles and technical concepts using either a pulsed laser or a gas discharge for plasma generation are presented, and critical aspects in the ionization dynamics are outlined within the framework of a simplified atomic physics model.

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来源期刊

Atoms Physics and Astronomy-Nuclear and High Energy Physics

CiteScore

2.70

自引率

22.20%

发文量

128

审稿时长

8 weeks

期刊介绍： Atoms (ISSN 2218-2004) is an international and cross-disciplinary scholarly journal of scientific studies related to all aspects of the atom. It publishes reviews, regular research papers, and communications; there is no restriction on the length of the papers. Our aim is to encourage scientists to publish their experimental and theoretical research in as much detail as possible. Full experimental and/or methodical details must be provided for research articles. There are, in addition, unique features of this journal: -manuscripts regarding research proposals and research ideas will be particularly welcomed. -computed data, program listings, and files regarding the full details of the experimental procedure, if unable to be published in a normal way, can be deposited as supplementary material. Scopes: -experimental and theoretical atomic, molecular, and nuclear physics, chemical physics -the study of atoms, molecules, nuclei and their interactions and constituents (protons, neutrons, and electrons) -quantum theory, applications and foundations -microparticles, clusters -exotic systems (muons, quarks, anti-matter) -atomic, molecular, and nuclear spectroscopy and collisions -nuclear energy (fusion and fission), radioactive decay -nuclear magnetic resonance (NMR) and electron spin resonance (ESR), hyperfine interactions -orbitals, valence and bonding behavior -atomic and molecular properties (energy levels, radiative properties, magnetic moments, collisional data) and photon interactions