氮化铝音叉谐振器多模抑制电极的设计

{"title":"氮化铝音叉谐振器多模抑制电极的设计","authors":"Yi Yuan, Qingrui Yang, Haolin Li, Shuai Shi, Pengfei Niu, Chongling Sun, Bohua Liu, Menglun Zhang, W. Pang","doi":"10.1063/10.0019629","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":35428,"journal":{"name":"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering","volume":" ","pages":""},"PeriodicalIF":3.5000,"publicationDate":"2023-06-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Electrode design for multimode suppression of aluminum nitride tuning fork resonators\",\"authors\":\"Yi Yuan, Qingrui Yang, Haolin Li, Shuai Shi, Pengfei Niu, Chongling Sun, Bohua Liu, Menglun Zhang, W. Pang\",\"doi\":\"10.1063/10.0019629\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":35428,\"journal\":{\"name\":\"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering\",\"volume\":\" \",\"pages\":\"\"},\"PeriodicalIF\":3.5000,\"publicationDate\":\"2023-06-29\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering\",\"FirstCategoryId\":\"1087\",\"ListUrlMain\":\"https://doi.org/10.1063/10.0019629\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering","FirstCategoryId":"1087","ListUrlMain":"https://doi.org/10.1063/10.0019629","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}