一种MEMS电容式传感器在超低力测量中机电解耦的仿生方法

{"title":"一种MEMS电容式传感器在超低力测量中机电解耦的仿生方法","authors":"Wendi Gao, B. Tian, Cunlang Liu, Yingbiao Mi, Chen Jia, Libo Zhao, Tao Liu, Nan Zhu, Ping Yang, Qijing Lin, Zhuangde Jiang, D. Sun","doi":"10.1007/s11465-023-0747-1","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":48635,"journal":{"name":"Frontiers of Mechanical Engineering","volume":null,"pages":null},"PeriodicalIF":4.7000,"publicationDate":"2023-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow force measurement\",\"authors\":\"Wendi Gao, B. Tian, Cunlang Liu, Yingbiao Mi, Chen Jia, Libo Zhao, Tao Liu, Nan Zhu, Ping Yang, Qijing Lin, Zhuangde Jiang, D. Sun\",\"doi\":\"10.1007/s11465-023-0747-1\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":48635,\"journal\":{\"name\":\"Frontiers of Mechanical Engineering\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":4.7000,\"publicationDate\":\"2023-06-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Frontiers of Mechanical Engineering\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://doi.org/10.1007/s11465-023-0747-1\",\"RegionNum\":2,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"ENGINEERING, MECHANICAL\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Frontiers of Mechanical Engineering","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1007/s11465-023-0747-1","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, MECHANICAL","Score":null,"Total":0}