预沉积Al层对金属有机化学气相沉积在Si衬底上生长AlN缓冲层和GaN膜的影响

{"title":"预沉积Al层对金属有机化学气相沉积在Si衬底上生长AlN缓冲层和GaN膜的影响","authors":"甄龙云, 彭鹏, 仇成功, 郑蓓蓉, A. Armaou, 钟蓉, Zhen Longyun, Peng Peng, Qiu Chenggong, Zheng Beirong, Zhong Rong","doi":"10.11901/1005.3093.2020.159","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":52466,"journal":{"name":"Cailiao Yanjiu Xuebao/Chinese Journal of Materials Research","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2020-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Effect of Pre-deposited Al Layer on Growth of AlN Buffer Layer and GaN Film on Si Substrate by Metal-organic Chemical Vapor Deposition\",\"authors\":\"甄龙云, 彭鹏, 仇成功, 郑蓓蓉, A. Armaou, 钟蓉, Zhen Longyun, Peng Peng, Qiu Chenggong, Zheng Beirong, Zhong Rong\",\"doi\":\"10.11901/1005.3093.2020.159\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":52466,\"journal\":{\"name\":\"Cailiao Yanjiu Xuebao/Chinese Journal of Materials Research\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-11-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Cailiao Yanjiu Xuebao/Chinese Journal of Materials Research\",\"FirstCategoryId\":\"1089\",\"ListUrlMain\":\"https://doi.org/10.11901/1005.3093.2020.159\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"Materials Science\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Cailiao Yanjiu Xuebao/Chinese Journal of Materials Research","FirstCategoryId":"1089","ListUrlMain":"https://doi.org/10.11901/1005.3093.2020.159","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"Materials Science","Score":null,"Total":0}