一种在砂纸上绘制银纳米线图案的简便方法及其在压力传感器中的应用

IF 2.8 4区 工程技术 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY
Li Wang, Yang Geng
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引用次数: 0

摘要

在粗糙表面沉积导电层可有效提高压力传感器的性能;然而,它的进一步应用需要对导电层进行图像化以获得相应的电布局。本文提出了一种在砂纸上进行银纳米线图案加工的简便、步骤少的方法。该方法采用光固化树脂作为关键材料,在紫外线照射下使用光掩膜来定义图案。研究发现,更大的固化深度和更窄的透光区域需要更长的曝光时间。在M-400砂纸上得到线宽约为40 μm的图案(M-400为目数)。在此基础上,制作了由粗糙表面和海绵状传感层组成的数字间电极压力传感器。结果表明,该传感器在小于2 kPa的情况下高压灵敏度为21.89 kPa−11,检测限低(24.5 Pa),工作电压低(0.01 V),响应时间短(84 ms)。此外,该图案化方法对材料和基材没有特殊要求,因此可以应用于在粗糙或光滑表面基材上对其他材料进行图案化。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A facile method to pattern silver nanowires on sandpaper and its application in pressure sensors
A conductive layer deposited on a rough surface can effectively improve the performance of a pressure sensor; however, its further application requires patterning of the conductive layer to obtain the corresponding electrical layout. In this paper, a facile patterning method with few steps was proposed for patterning silver nanowires on sandpaper. This method employed a photocurable resin as the key material to define the pattern using a photomask under UV exposure. It was found that greater cure depths and narrower light-transmitting areas require longer exposure times. A pattern with linewidth of approximately 40 μm was obtained on M-400 sandpaper (M-400 stands for the mesh number). Based on this method, pressure sensors consisting of interdigital electrodes with rough surfaces and sponge-sensing layers were fabricated. The best resulting sensor exhibited a high-pressure sensitivity of 21.89 kPa−11 for less than 2 kPa, a low detection limit (24.5 Pa), low operating voltage (0.01 V), and short response time (84 ms). Moreover, this patterning method has no special requirements for materials and substrates and thus can be applied to pattern other materials on rough or smooth surface substrates.
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来源期刊
Flexible and Printed Electronics
Flexible and Printed Electronics MATERIALS SCIENCE, MULTIDISCIPLINARY-
CiteScore
4.80
自引率
9.70%
发文量
101
期刊介绍: Flexible and Printed Electronics is a multidisciplinary journal publishing cutting edge research articles on electronics that can be either flexible, plastic, stretchable, conformable or printed. Research related to electronic materials, manufacturing techniques, components or systems which meets any one (or more) of the above criteria is suitable for publication in the journal. Subjects included in the journal range from flexible materials and printing techniques, design or modelling of electrical systems and components, advanced fabrication methods and bioelectronics, to the properties of devices and end user applications.
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