大气压和中压下氖操作DBD的光谱研究

IF 1.3 Q3 ORTHOPEDICS
R. Bansemer, L. Scholten, J. Winter, K. Weltmann
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引用次数: 0

摘要

研究了在氖气中工作的正弦激励文丘里DBD。利用激光原子吸收光谱对不同压力水平下的Ne(1s5)亚稳态密度进行了空间分辨。在大气压下可以确定高达71016 m−3的密度值,在100毫巴下可以确定低达31016 m−3。对于所有研究的参数,发现阴极附近的Ne(1s5)密度明显高于阳极区域。使用相分辨光学发射光谱对放电发展进行补充研究,完成了器件的表征。发现放电在电流波形和亮度分布方面显示出类似辉光放电的典型特性。此外,还测定了工艺气体中氮、氧杂质和掺合料的影响。发现对Ne(1s5)浓度和电流波形都有显著影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Spectroscopic investigation of a neon-operated DBD at atmospheric and intermediate pressure
A sinusoidally-excited Venturi-DBD operating in neon has been investigated. The Ne(1s5) metastable density has been quantified spatially resolved using laser atomic absorption spectroscopy for different pressure levels. Density values of up to 7 · 1016 m−3 could be determined at atmospheric pressure and up to 3 · 1016 m−3 at 100 mbar. For all investigated parameters, the Ne(1s5) density was found to be distinctly higher in the proximity of the cathode than in the anode region. Complementary investigations of the discharge development using phase-resolved optical emission spectroscopy complete the characterization of the device. The discharge was found to show typical properties of a glow-like discharge regarding current waveform and luminosity distribution. In addition, the influence of nitrogen and oxygen impurities and admixtures in the process gas has been determined. A substantial impact was found on both the Ne(1s5) concentration and the current waveform.
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来源期刊
Plasma Research Express
Plasma Research Express Energy-Nuclear Energy and Engineering
CiteScore
2.60
自引率
0.00%
发文量
15
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