TiAlCrSiN薄膜在N₂/0.1%H₂S气体中的高温腐蚀

Journal of nanoscience and nanotechnology Pub Date : 2018-03-01 DOI:10.1166/jnn.2018.14978

Jae Chun Lee, Poonam Yadav, Dong Bok Lee

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引用次数: 0

摘要

将纳米TiAlCrSiN多层膜在n2 /0.1% h2s混合气体中900℃腐蚀5 ~ 300 h，腐蚀产物为TiO2、α-Al2O3和Cr2O3。从腐蚀初期开始，除了Al、Ti、Cr和Si向外扩散外，还发生了氧向内迁移。随着腐蚀的进行，氧化膜上形成最外层的TiO2层、最外层(贫ti，富(Al,Cr))氧化层、最内侧(富ti，贫(Al,Cr))氧化层和最内侧部分氧化膜。

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High Temperature Corrosion of TiAlCrSiN Films in N₂/0.1%H₂S Gas.

Nanomultilayered TiAlCrSiN film was corroded in N2/0.1%H2S-mixed gas at 900 °C for 5-300 h. It corroded to TiO2, α-Al2O3, and Cr2O3. From the early corrosion stage, not only the outward diffusion of Al, Ti, Cr, and Si but also the inward migration of oxygen occurred. As the corrosion proceeded, the outermost TiO2 layer, outer (Ti-depleted, (Al,Cr)-rich)-oxide layer, inner (Ti-rich, (Al,Cr)-depleted)-oxide layer, and partially oxidizing innermost film formed on the oxygenaffected film.

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来源期刊

Journal of nanoscience and nanotechnology 工程技术-材料科学：综合

自引率

0.00%

发文量

审稿时长

3.6 months

期刊介绍： JNN is a multidisciplinary peer-reviewed journal covering fundamental and applied research in all disciplines of science, engineering and medicine. JNN publishes all aspects of nanoscale science and technology dealing with materials synthesis, processing, nanofabrication, nanoprobes, spectroscopy, properties, biological systems, nanostructures, theory and computation, nanoelectronics, nano-optics, nano-mechanics, nanodevices, nanobiotechnology, nanomedicine, nanotoxicology.