可植入微系统用滚铸模聚二甲基硅氧烷包封剂的粘附性和隔湿性。

Proceedings of IEEE Sensors. IEEE International Conference on Sensors Pub Date : 2012-10-28 DOI:10.1109/ICSENS.2012.6411369

Shem B Lachhman, Christian A Zorman, Wen H Ko

{"title":"可植入微系统用滚铸模聚二甲基硅氧烷包封剂的粘附性和隔湿性。","authors":"Shem B Lachhman, Christian A Zorman, Wen H Ko","doi":"10.1109/ICSENS.2012.6411369","DOIUrl":null,"url":null,"abstract":"Poly-dimethylsiloxane (PDMS) is a highly attractive polymer to encapsulate implantable micro-electromechanical systems (MEMS) due to its biocompatibility, simplicity in processing, and low Young's Modulus. However, conventional deposition processes introduce defects that prevent the use of PDMS as a long term packaging material. In order to address these issues, we have developed a novel roller-casting process for depositing PDMS. This paper presents the findings of a study to simultaneously investigate the adhesion properties and moisture barrier characteristics of roller-cast, multilayered PDMS encapsulants subjected to testing in saline at 85°C.","PeriodicalId":74503,"journal":{"name":"Proceedings of IEEE Sensors. IEEE International Conference on Sensors","volume":"2012 ","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2012-10-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1109/ICSENS.2012.6411369","citationCount":"14","resultStr":"{\"title\":\"Adhesion and Moisture Barrier Characteristics of Roller-Cast Polydimethylsiloxane Encapsulants for Implantable Microsystems.\",\"authors\":\"Shem B Lachhman, Christian A Zorman, Wen H Ko\",\"doi\":\"10.1109/ICSENS.2012.6411369\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Poly-dimethylsiloxane (PDMS) is a highly attractive polymer to encapsulate implantable micro-electromechanical systems (MEMS) due to its biocompatibility, simplicity in processing, and low Young's Modulus. However, conventional deposition processes introduce defects that prevent the use of PDMS as a long term packaging material. In order to address these issues, we have developed a novel roller-casting process for depositing PDMS. This paper presents the findings of a study to simultaneously investigate the adhesion properties and moisture barrier characteristics of roller-cast, multilayered PDMS encapsulants subjected to testing in saline at 85°C.\",\"PeriodicalId\":74503,\"journal\":{\"name\":\"Proceedings of IEEE Sensors. IEEE International Conference on Sensors\",\"volume\":\"2012 \",\"pages\":\"1-4\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-10-28\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1109/ICSENS.2012.6411369\",\"citationCount\":\"14\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of IEEE Sensors. IEEE International Conference on Sensors\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2012.6411369\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of IEEE Sensors. IEEE International Conference on Sensors","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2012.6411369","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 14

摘要

聚二甲基硅氧烷(PDMS)由于其生物相容性、加工简单和低杨氏模量，是一种非常有吸引力的可封装植入式微机电系统(MEMS)的聚合物。然而，传统的沉积工艺引入了缺陷，阻碍了PDMS作为长期包装材料的使用。为了解决这些问题，我们开发了一种新的辊铸工艺来沉积PDMS。本文介绍了一项研究的结果，该研究同时研究了辊铸多层PDMS包封剂在85°C盐水中进行测试的粘附性能和防潮特性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Adhesion and Moisture Barrier Characteristics of Roller-Cast Polydimethylsiloxane Encapsulants for Implantable Microsystems.

Poly-dimethylsiloxane (PDMS) is a highly attractive polymer to encapsulate implantable micro-electromechanical systems (MEMS) due to its biocompatibility, simplicity in processing, and low Young's Modulus. However, conventional deposition processes introduce defects that prevent the use of PDMS as a long term packaging material. In order to address these issues, we have developed a novel roller-casting process for depositing PDMS. This paper presents the findings of a study to simultaneously investigate the adhesion properties and moisture barrier characteristics of roller-cast, multilayered PDMS encapsulants subjected to testing in saline at 85°C.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Proceedings of IEEE Sensors. IEEE International Conference on Sensors

CiteScore

1.30

自引率

0.00%

发文量