喷雾热解沉积未掺杂SnO2和In2O3薄膜及其结构性能

IF 4.5 2区 材料科学 Q1 CRYSTALLOGRAPHY
G. Korotcenkov, B.K. Cho
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引用次数: 32

摘要

本文介绍了喷雾热解法制备SnO2和In2O3薄膜的结构分析结果。本分析的主要目的是总结在该领域取得的成果,强调薄膜沉积参数与材料结构之间的相关性,并提出一些典型的金属氧化物的一般规律。讨论了热溶胶沉积技术的特点和机理,以及热溶胶沉积技术的优缺点。结果表明,该技术在控制金属氧化物的厚度、晶粒尺寸、织构、粗糙度、晶粒饰面和孔隙率等结构参数方面具有很大的潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Spray pyrolysis deposition of undoped SnO2 and In2O3 films and their structural properties

In this paper the results of structural analysis of the SnO2 and In2O3 films deposited by spray pyrolysis are presented. The main goals of this analysis are summarizing the results obtained in this field, highlighting a correlation between parameters of film deposition and the material structure and formulating some general regularities, typical for metal oxides. Peculiarities and mechanisms of pyrosol deposition as well as advantages and disadvantages of this technology for deposition of the films with required parameters were also discussed. It is shown that this technology has great potential for controlling structural parameters of metal oxides such as thickness, the grain size, texturing, roughness, the grain faceting and the porosity.

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来源期刊
Progress in Crystal Growth and Characterization of Materials
Progress in Crystal Growth and Characterization of Materials 工程技术-材料科学:表征与测试
CiteScore
8.80
自引率
2.00%
发文量
10
审稿时长
1 day
期刊介绍: Materials especially crystalline materials provide the foundation of our modern technologically driven world. The domination of materials is achieved through detailed scientific research. Advances in the techniques of growing and assessing ever more perfect crystals of a wide range of materials lie at the roots of much of today''s advanced technology. The evolution and development of crystalline materials involves research by dedicated scientists in academia as well as industry involving a broad field of disciplines including biology, chemistry, physics, material sciences and engineering. Crucially important applications in information technology, photonics, energy storage and harvesting, environmental protection, medicine and food production require a deep understanding of and control of crystal growth. This can involve suitable growth methods and material characterization from the bulk down to the nano-scale.
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