Nb2O5薄膜的表面形貌、光学特性和电物理性能

IF 1 4区化学 Q4 SPECTROSCOPY

Journal of Applied Spectroscopy Pub Date : 2025-09-11 DOI:10.1007/s10812-025-01967-1

N. A. Bosak, P. V. Shpak, A. N. Chumakov, L. V. Baran, V. V. Malutina-Bronskaya, V. S. Drobush, A. S. Kuzmitskaya

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引用次数: 0

摘要

采用多脉冲高频激光作用（f ~ 10 ~ 12 kHz），在功率密度q = 81 MW/cm2的陶瓷靶上，对石英和硅衬底真空（p = 2.2 Pa）沉积Nb2O5薄膜进行了复杂的研究。用原子力显微镜研究了这些薄膜的形貌。给出了透射光谱的特征。分析了Nb2O5/Si结构的光电性能。

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Surface Morphology, Optical Characteristics and Electrophysical Properties of Nb2O5 Films

Results are given for a complex study of thin Nb₂O₅ films deposited in vacuum (p = 2.2 Pa) on quartz and silicon substrates using multi-pulse high-frequency laser action (f ~ 10–12 kHz) on a ceramic target with laser power density q = 81 MW/cm². The morphology of these films was studied using atomic force microscopy. Features of the transmission spectra were presented. The photoelectrical properties of the Nb₂O₅/Si structure were analyzed.

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来源期刊

Journal of Applied Spectroscopy SPECTROSCOPY-

CiteScore

1.30

自引率

14.30%

发文量

145

审稿时长

2.5 months

期刊介绍： Journal of Applied Spectroscopy reports on many key applications of spectroscopy in chemistry, physics, metallurgy, and biology. An increasing number of papers focus on the theory of lasers, as well as the tremendous potential for the practical applications of lasers in numerous fields and industries.