真空激光沉积压电陶瓷薄膜的表面形貌及光学和电物理性能

IF 0.8 4区化学 Q4 SPECTROSCOPY

Journal of Applied Spectroscopy Pub Date : 2025-03-10 DOI:10.1007/s10812-025-01877-2

N. A. Bosak, M. V. Bushinsky, A. N. Chobot, L. Vu. Baran, V. V. Malyutina-Bronskaya, I. A. Taratyn

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引用次数: 0

摘要

利用波长 λ = 1.064 μm、功率密度 q = 33 MW/cm2 的高频重复脉冲 f ~ 10-12 kHz 激光辐射，在真空室压力 p = 2.2-10-2 mm Hg 的条件下，在压电陶瓷 PZT-19 靶材上获得了硅和玻璃基底上的纳米结构薄膜。使用原子力显微镜研究了压电陶瓷薄膜的形态。研究了所得薄膜在可见光、近红外和中红外区域的透射光谱。分析了硅衬底上 PZT-19/Si 结构的电物理特性。

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Surface Morphology and Optical and Electrophysical Properties of Piezoceramic Films Obtained by Laser Deposition in Vacuum

Nanostructured thin films on silicon and glass substrates have been obtained using high-frequency repetitively pulsed f ~ 10–12 kHz laser radiation with wavelength λ = 1.064 μm and power density q = 33 MW/cm² on a piezoceramic PZT-19 target at vacuum chamber pressure p = 2.2·10^–2 mm Hg. The morphology of the thin piezoceramic films was studied using atomic force microscopy. Transmission spectra of the obtained films were investigated in the visible and near- and mid-IR regions. The electrophysical characteristics of PZT-19/Si structures on Si substrate were analyzed.

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来源期刊

Journal of Applied Spectroscopy SPECTROSCOPY-

CiteScore

1.30

自引率

14.30%

发文量

145

审稿时长

2.5 months

期刊介绍： Journal of Applied Spectroscopy reports on many key applications of spectroscopy in chemistry, physics, metallurgy, and biology. An increasing number of papers focus on the theory of lasers, as well as the tremendous potential for the practical applications of lasers in numerous fields and industries.