IF 3.5 2区 物理与天体物理 Q2 PHYSICS, APPLIED
Nirbhav Singh Chopra, Yevgeny Raitses
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引用次数: 0

摘要

电子束(e-beam)产生的等离子体带有交叉电场和磁场(E×B),有望用于低损伤(温和)材料加工。然而,这些等离子体可能会形成沿 E×B 方向传播的等离子体不均匀性。这些旋转等离子体结构(或 "辐条")会增强带电物种在磁场中的传输,从而损害等离子体的温和加工能力。在这项工作中,我们通过在阴极的轴向相反侧加入一个可变偏置导电边界(称为反阴极),研究了静电活动边界对辐条形成的作用。我们的研究结果表明,当反阴极具有电子收集功能时,会出现方位模抑制现象。此外,我们还通过将反阴极偏置到阴极和阳极电位之间的中间电位,显示了选择性的方位模抑制。这些发现表明,电子束产生的等离子体中的轴向电子约束与方位传播等离子体结构的形成之间存在联系。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Anticathode effect on multimodal azimuthal oscillations in electron beam generated E×B plasma
Electron beam (e-beam) generated plasmas with applied crossed electric and magnetic (E×B) fields are promising for low-damage (gentle) material processing. However, these plasmas can be subject to the formation of plasma non-uniformities propagating in the E×B direction. These rotating plasma structures (or “spokes”) enhance the transport of charged species across the magnetic field, which can harm the gentle processing capability of the plasma. In this work, we investigate the role of electrostatically active boundaries on the spoke formation by incorporating a variable bias conducting boundary (known as an anticathode) placed on the axially opposite side of the cathode. Our findings indicate azimuthal mode suppression occurs when the anticathode is electron collecting. Furthermore, we show selective azimuthal mode suppression by biasing the anticathode to an intermediate potential between the cathode and anode potentials. These findings suggest a link between the axial electron confinement in the e-beam generated plasma and azimuthally propagating plasma structure formation.
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来源期刊
Applied Physics Letters
Applied Physics Letters 物理-物理:应用
CiteScore
6.40
自引率
10.00%
发文量
1821
审稿时长
1.6 months
期刊介绍: Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology. In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics. APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field. Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.
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