Marcella Salvatore, Francesco Reda, Fabio Borbone and Stefano Luigi Oscurato
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Multilevel azopolymer patterning from digital holographic lithography
Azopolymer-based maskless lithography enables direct, all-optical fabrication of complex surface patterns. However, typical surface reliefs are limited to smooth profiles. Here, by investigating the resolution, contrast ratio, and gray-scale nonlinearities of a holo-lithographic setup based on computer-generated holography, we extend this patterning approach to fabricate, for the first time, multilevel reliefs with step-like discontinuities.
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