Single-layer MoS2/graphene-based stable on-chip Zn-ion microbattery for monolithically integrated electronics.

Self-powered microelectronics are essential for the sustained and autonomous operations of wireless electronics and microrobots. However, they are challenged by integratable microenergy supplies. Herein, we report a single-layer (SL) MoS₂/graphene heterostructure for stable Zn-ion microbatteries. The MoS₂/graphene heterostructure not only provides high chemical affinity for Zn and generates perfect lattice matching for Zn (002) deposition, but also facilitates homogeneous current density distribution. As a result, Zn metal is reversibly epitaxially plating/stripping at/from the heterostructure, without the formation of dendrites. The MoS₂/graphene-based Zn||MnO₂ microbattery with a tiny footprint area sub-0.1 mm² shows a stable high capacity of 0.16 mAh cm^-2 at 0.5 mA cm^-2 within 470 cycles. Using a single piece of crystalline MoS₂/graphene film, on-chip microbatteries and transistors were simultaneously fabricated via a facile lithography process, achieving highly integrated self-powered field-effect transistors and photodetector. The SL MoS₂/graphene-based self-powered monolithically integrated microsystem paves a new way for the multi-functionalization and miniaturization of next-generation electronics.