溅射过程中引入 H2 和 O2 对 In2O3 基透明导电薄膜和铜电极 HJT 太阳能电池的影响

IF 3.8 3区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Optical Materials Pub Date : 2024-11-19 DOI:10.1016/j.optmat.2024.116452

Guiming Meng , Guanghong Wang , Yuanbo Gong , Chenyu Zhu , Xiaoxia Zhao , Jingxuan Zhou , Caixia Wang , Shengzhi Xu , Hongbo Tian , Wei Wang , Lei Zhao , Ying Zhao , Xiaodan Zhang

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引用次数: 0

摘要

采用直流磁控溅射法制备了掺杂比为 90:10 和 97:3 的二氧化锰掺杂 In2O3（ITO）薄膜以及掺杂 Zr、Ti 和 Ga 的 In2O3 薄膜（IXO）。氢气对各种基于 In2O3 的透明导电氧化物薄膜（TCO）的性能产生了不同的影响。氢气增强了 TCO 薄膜的（222）优先取向生长。IXO 薄膜的最高载流子迁移率为 73.7 cm2/Vs。ITO（90:10 wt%）的电阻率最低，为 2.6x10-4 Ω cm。在特定氧含量条件下，ITO（90:10 wt%）在 400-1100 纳米波长范围内的平均透射率高达 93.6%。优化后的 TCO 薄膜被选择性地用作硅异质结 (HJT) 太阳能电池的电极。最高转换效率为 24.803%。这项研究阐明了氧和氢含量对 TCO 薄膜的影响，为制备高效 HJT 太阳能电池提供了有效指导。

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Influence of H2 and O2 introduction during sputtering on In2O3-based transparent conductive films and HJT solar cells with copper electrode

The SnO₂-doped In₂O₃ (ITO) films with doping ratio of 90:10 and 97:3 and Zr, Ti and Ga-doped In₂O₃ film (IXO) were prepared by DC magnetron sputtering. Hydrogen showed the different effect on properties of various In₂O₃-based transparent conductive oxide film (TCO). It enhanced the (222) preferential orientation growth of TCO films. The highest carrier mobility of the IXO films was 73.7 cm²/Vs. The lowest resistivity of the ITO (90:10 wt%) was 2.6x10⁻⁴ Ω cm. The average transmittance of the ITO (90:10 wt%) was as high as 93.6 % under specific oxygen content in the wavelength range of 400–1100 nm. The optimized TCO films were selectively applied as the electrodes of the silicon heterojunction (HJT) solar cells. The highest conversion efficiency was 24.803 %. This work clarified the effect of oxygen and hydrogen content on the TCO films, which offers a valid guidance to prepare the high-efficiency HJT solar cells.

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来源期刊

Optical Materials 工程技术-材料科学：综合

CiteScore

6.60

自引率

12.80%

发文量

1265

审稿时长

38 days

期刊介绍： Optical Materials has an open access mirror journal Optical Materials: X, sharing the same aims and scope, editorial team, submission system and rigorous peer review. The purpose of Optical Materials is to provide a means of communication and technology transfer between researchers who are interested in materials for potential device applications. The journal publishes original papers and review articles on the design, synthesis, characterisation and applications of optical materials. OPTICAL MATERIALS focuses on: • Optical Properties of Material Systems; • The Materials Aspects of Optical Phenomena; • The Materials Aspects of Devices and Applications. Authors can submit separate research elements describing their data to Data in Brief and methods to Methods X.