氧化物孔径对 850 纳米 VCSEL 静态和动态性能的影响

IF 2.3 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Photonics Technology Letters Pub Date : 2024-10-16 DOI:10.1109/LPT.2024.3481471

ShanShan Du;JinBao Su;HengJie Zhou;Huan Zhang;PingPing Qiu;Jun Deng;Qiang Kan;YiYang Xie

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引用次数: 0

摘要

我们制作了氧化物孔径为 5、7、9 和 $11~\mu $ m 的 850 nm 垂直腔面发射激光器 (VCSEL)，并研究了氧化物孔径对器件的阈值电流、输出功率、差量子效率和壁插效率的影响。我们描述了器件的小信号调制带宽（{f} _{3dB}$），并探讨了氧化孔径大小和偏置电流对调制带宽的影响。我们分析了电功率与器件{f} _{3dB}$之间的关系。_{3dB}$ 的关系。在室温下，氧化物孔径直径为 $7~\mu $ m 的 850-nm VCSEL 显示出最大 ${f} _{3dB}$ 。_{3dB}$ 接近 20 GHz，输出功率为 9.09 mW。当氧化物孔径增大到 11~\mu $ m 时，{f} _{3dB}$ 仍然保持不变。_{3dB}$ 保持在 17 GHz 以上，光输出功率超过 14 mW。

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Impact of Oxide Aperture on the Static and Dynamic Performance of 850-nm VCSELs

We fabricate 850-nm vertical-cavity surface-emitting lasers (VCSELs) with oxide-aperture diameters of 5, 7, 9 and

$11~\mu $

m and study the effect of oxide-aperture size on the threshold current, output power, differential quantum efficiency and wall-plug efficiency of the devices. We characterize the small-signal modulation bandwidth (

${f} _{3dB}$

) of the devices and explore the impact of oxide-aperture size and bias current on the modulation bandwidth. We analyze the relationship between electrical power and the

${f} _{3dB}$

of the VCSELs with different aperture diameters. The fabricated 850-nm VCSEL with the oxide-aperture diameter of

$7~\mu $

m at room temperature shows a maximum

${f} _{3dB}$

of nearly 20 GHz and an output power of 9.09 mW. When the oxide-aperture increases to

$11~\mu $

m, the

${f} _{3dB}$

remains above 17 GHz and the optical output power exceeds 14 mW.

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来源期刊

IEEE Photonics Technology Letters 工程技术-工程：电子与电气

CiteScore

5.00

自引率

3.80%

发文量

404

审稿时长

2.0 months

期刊介绍： IEEE Photonics Technology Letters addresses all aspects of the IEEE Photonics Society Constitutional Field of Interest with emphasis on photonic/lightwave components and applications, laser physics and systems and laser/electro-optics technology. Examples of subject areas for the above areas of concentration are integrated optic and optoelectronic devices, high-power laser arrays (e.g. diode, CO2), free electron lasers, solid, state lasers, laser materials'' interactions and femtosecond laser techniques. The letters journal publishes engineering, applied physics and physics oriented papers. Emphasis is on rapid publication of timely manuscripts. A goal is to provide a focal point of quality engineering-oriented papers in the electro-optics field not found in other rapid-publication journals.