联合气体放电双层二极管特性研究

IF 1.1 4区 物理与天体物理 Q4 PHYSICS, APPLIED
B. M. Brzhozovskii, M. B. Brovkova, S. G. Gestrin, E. P. Zinina, V. V. Martynov
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引用次数: 0

摘要

论文显示,在谐振腔内点燃组合气体放电后,工件周围会出现一个由正负电荷层组成的具有二极管特性的双电层。向腔室提供的微波功率水平的增加会导致开路和闭路模式下等效二极管电阻的减小以及流经该装置的电流的增加。被微波场电离的加工气体(氮气或氩气)离子落在产品表面,并通过热扩散过程扩散到产品表面,使表面层变硬。当对产品施加正偏置电位时,产品会被到达表面的高能电子流加热,并在放电加速区被加速到几十到几百 eV 的能量。离子等离子植入可显著提高加工产品表面的强度、耐磨性和耐腐蚀性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

An Investigation of the Diode Properties of a Double Layer of a Combined Gas Discharge

An Investigation of the Diode Properties of a Double Layer of a Combined Gas Discharge

The paper shows that upon ignition of the combined gas discharge in the resonator chamber, there appears a double layer with diode properties that consists of layers of positive and negative charges surrounding the workpiece. An increase in the level of microwave power supplied to the chamber leads to a decrease in the equivalent diode resistance in open and closed modes and an increase in the current flowing through the unit. The ions of the process gas (nitrogen or argon) ionized by the microwave field fall on the product surface and diffuse into it as a result of the thermal diffusion process, which hardens the surface layer. The product is heated when a positive bias potential is applied to it by a stream of high-energy electrons arriving at the surface and accelerated to energies of tens and hundreds eV in the discharge acceleration zone. Ion-plasma implantation leads to a significant increase in the strength, wear resistance and corrosion resistance of the surface of the processed product.

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来源期刊
Technical Physics
Technical Physics 物理-物理:应用
CiteScore
1.30
自引率
14.30%
发文量
139
审稿时长
3-6 weeks
期刊介绍: Technical Physics is a journal that contains practical information on all aspects of applied physics, especially instrumentation and measurement techniques. Particular emphasis is put on plasma physics and related fields such as studies of charged particles in electromagnetic fields, synchrotron radiation, electron and ion beams, gas lasers and discharges. Other journal topics are the properties of condensed matter, including semiconductors, superconductors, gases, liquids, and different materials.
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