R. A. Shaposhnikov, S. A. Garakhin, K. V. Durov, V. N. Polkovnikov, N. I. Chkhalo
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引用次数: 0
摘要
本文研究了周期为 3.74-3.84 nm 的 Mo/B4C 多层 X 射线反射镜的特性。研究了透射带、反射系数和镜面内应力大小与周期内材料厚度比的关系。论文还介绍了热退火对反射镜结构参数和反射特性影响的研究结果。
Investigation of the Properties of Multilayer Mirrors Based on a Pair of Materials Mo/B4C
The properties of Mo/B4C multilayer X-ray mirrors with periods of 3.74–3.84 nm are studied in this work. The dependences of the transmission band, reflection coefficient and the magnitude of internal stresses in mirrors on the ratio of material thicknesses in the period were investigated. The results of a study of the effect of thermal annealing on the structural parameters and reflective characteristics of mirrors are also presented in the paper.
期刊介绍:
Technical Physics is a journal that contains practical information on all aspects of applied physics, especially instrumentation and measurement techniques. Particular emphasis is put on plasma physics and related fields such as studies of charged particles in electromagnetic fields, synchrotron radiation, electron and ion beams, gas lasers and discharges. Other journal topics are the properties of condensed matter, including semiconductors, superconductors, gases, liquids, and different materials.