{"title":"材料各向异性对圆板构型压电振子一阶振动的影响","authors":"","doi":"10.1016/j.sna.2024.115918","DOIUrl":null,"url":null,"abstract":"<div><div>Valveless piezoelectric pumps are widely used in microfluidic actuation because of their simple structure, ease of integration, absence of electromagnetic interference, minimal valve wear, and absence of frequency–response lag issues. These pumps primarily rely on chamber volume changes, causing most piezoelectric oscillators to operate in the first-order vibration mode. However, recent studies on valveless piezoelectric pumps have observed that many pumps exhibit two flow peaks at similar operating frequencies; the underlying mechanism behind this anomaly remains underexplored. In this study, we investigated the impact of substrate metal on the first-order vibrations of piezoelectric oscillators. By conducting tensile tests on rolled pure copper sheets, we measured Poisson's ratio and the elastic modulus in both the parallel and perpendicular rolling directions. Subsequently, we derived the natural frequencies on the plane. Experimental verification of the theoretical predictions was achieved through amplitude experiments conducted on piezoelectric oscillators in air. The dual-peak flow phenomenon was demonstrated to be solely related to the substrate metal of the piezoelectric oscillator. This is attributed to the presence of two first-order vibration natural frequencies on the plane of the substrate metal, resulting in the generation of two amplitude peaks and consequently the appearance of two flow peaks.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":null,"pages":null},"PeriodicalIF":4.1000,"publicationDate":"2024-09-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Effect of material anisotropy on the first-order vibration of piezoelectric oscillators in circular plate configurations\",\"authors\":\"\",\"doi\":\"10.1016/j.sna.2024.115918\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>Valveless piezoelectric pumps are widely used in microfluidic actuation because of their simple structure, ease of integration, absence of electromagnetic interference, minimal valve wear, and absence of frequency–response lag issues. These pumps primarily rely on chamber volume changes, causing most piezoelectric oscillators to operate in the first-order vibration mode. However, recent studies on valveless piezoelectric pumps have observed that many pumps exhibit two flow peaks at similar operating frequencies; the underlying mechanism behind this anomaly remains underexplored. In this study, we investigated the impact of substrate metal on the first-order vibrations of piezoelectric oscillators. By conducting tensile tests on rolled pure copper sheets, we measured Poisson's ratio and the elastic modulus in both the parallel and perpendicular rolling directions. Subsequently, we derived the natural frequencies on the plane. Experimental verification of the theoretical predictions was achieved through amplitude experiments conducted on piezoelectric oscillators in air. The dual-peak flow phenomenon was demonstrated to be solely related to the substrate metal of the piezoelectric oscillator. This is attributed to the presence of two first-order vibration natural frequencies on the plane of the substrate metal, resulting in the generation of two amplitude peaks and consequently the appearance of two flow peaks.</div></div>\",\"PeriodicalId\":21689,\"journal\":{\"name\":\"Sensors and Actuators A-physical\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":4.1000,\"publicationDate\":\"2024-09-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Sensors and Actuators A-physical\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0924424724009129\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors and Actuators A-physical","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0924424724009129","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Effect of material anisotropy on the first-order vibration of piezoelectric oscillators in circular plate configurations
Valveless piezoelectric pumps are widely used in microfluidic actuation because of their simple structure, ease of integration, absence of electromagnetic interference, minimal valve wear, and absence of frequency–response lag issues. These pumps primarily rely on chamber volume changes, causing most piezoelectric oscillators to operate in the first-order vibration mode. However, recent studies on valveless piezoelectric pumps have observed that many pumps exhibit two flow peaks at similar operating frequencies; the underlying mechanism behind this anomaly remains underexplored. In this study, we investigated the impact of substrate metal on the first-order vibrations of piezoelectric oscillators. By conducting tensile tests on rolled pure copper sheets, we measured Poisson's ratio and the elastic modulus in both the parallel and perpendicular rolling directions. Subsequently, we derived the natural frequencies on the plane. Experimental verification of the theoretical predictions was achieved through amplitude experiments conducted on piezoelectric oscillators in air. The dual-peak flow phenomenon was demonstrated to be solely related to the substrate metal of the piezoelectric oscillator. This is attributed to the presence of two first-order vibration natural frequencies on the plane of the substrate metal, resulting in the generation of two amplitude peaks and consequently the appearance of two flow peaks.
期刊介绍:
Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas:
• Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results.
• Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon.
• Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays.
• Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers.
Etc...