{"title":"用于 IGBT 的 500 μm 重微合金铜线:微观结构特征、电疲劳断裂机制和接合可靠性研究","authors":"Bo-Ding Wu, Fei-Yi Hung, Kang-Pei Chan","doi":"10.1016/j.microrel.2024.115512","DOIUrl":null,"url":null,"abstract":"<div><div>In this study, we introduced trace amounts of silver and nickel into 500 μm diameter copper wires to form micro-alloyed copper wires used in insulated gate bipolar transistors (IGBT). The addition of silver and nickel enhanced the mechanical properties of the conductors and suppressed the work hardening effect, significantly improving the power cyclic lifetime. Additionally, this study conducted chlorination and high-temperature oxidation test to compare the application characteristics of the heavy micro-alloyed copper wires with pure copper wires, through tensile and bending test, as well as electrical property comparisons. Finally, Cu<img>50Ni (50 ppm Ni) wires were selected and nickel ceramic substrates for wire bonding to evaluate module electrical properties and bonding reliability.</div><div>In the chloride test, there was no significant pitting corrosion observed in copper wire, and the micro-alloyed copper wire outperformed the pure copper wires in terms of bending lifetime and power cycling performance. In the high-temperature oxidation test, an oxide layer of cuprous oxide formed on the surface of all wires. The pure copper wire exhibited a significant increase in resistance. Notably, the micro-alloyed copper wires had better resistance to oxidation. Regarding wire bonding, the use of Cu<img>50Ni wires and nickel ceramic substrates reduced the diffusion rate of nickel atoms from the substrate to the copper wire, forming a thinner alloy diffusion layer. This prevented electrical degradation and achieved high bonding reliability, especially under higher bonding forces. These findings confirm that micro-alloyed copper wires are suitable for high-power applications.</div></div>","PeriodicalId":51131,"journal":{"name":"Microelectronics Reliability","volume":"162 ","pages":"Article 115512"},"PeriodicalIF":1.6000,"publicationDate":"2024-09-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"500 μm heavy micro-alloyed Cu wire for IGBT application: The study on microstructure characteristics, electrical fatigue fracture mechanism and bonding reliability\",\"authors\":\"Bo-Ding Wu, Fei-Yi Hung, Kang-Pei Chan\",\"doi\":\"10.1016/j.microrel.2024.115512\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>In this study, we introduced trace amounts of silver and nickel into 500 μm diameter copper wires to form micro-alloyed copper wires used in insulated gate bipolar transistors (IGBT). The addition of silver and nickel enhanced the mechanical properties of the conductors and suppressed the work hardening effect, significantly improving the power cyclic lifetime. Additionally, this study conducted chlorination and high-temperature oxidation test to compare the application characteristics of the heavy micro-alloyed copper wires with pure copper wires, through tensile and bending test, as well as electrical property comparisons. Finally, Cu<img>50Ni (50 ppm Ni) wires were selected and nickel ceramic substrates for wire bonding to evaluate module electrical properties and bonding reliability.</div><div>In the chloride test, there was no significant pitting corrosion observed in copper wire, and the micro-alloyed copper wire outperformed the pure copper wires in terms of bending lifetime and power cycling performance. In the high-temperature oxidation test, an oxide layer of cuprous oxide formed on the surface of all wires. The pure copper wire exhibited a significant increase in resistance. Notably, the micro-alloyed copper wires had better resistance to oxidation. Regarding wire bonding, the use of Cu<img>50Ni wires and nickel ceramic substrates reduced the diffusion rate of nickel atoms from the substrate to the copper wire, forming a thinner alloy diffusion layer. This prevented electrical degradation and achieved high bonding reliability, especially under higher bonding forces. These findings confirm that micro-alloyed copper wires are suitable for high-power applications.</div></div>\",\"PeriodicalId\":51131,\"journal\":{\"name\":\"Microelectronics Reliability\",\"volume\":\"162 \",\"pages\":\"Article 115512\"},\"PeriodicalIF\":1.6000,\"publicationDate\":\"2024-09-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Microelectronics Reliability\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0026271424001926\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microelectronics Reliability","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0026271424001926","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
500 μm heavy micro-alloyed Cu wire for IGBT application: The study on microstructure characteristics, electrical fatigue fracture mechanism and bonding reliability
In this study, we introduced trace amounts of silver and nickel into 500 μm diameter copper wires to form micro-alloyed copper wires used in insulated gate bipolar transistors (IGBT). The addition of silver and nickel enhanced the mechanical properties of the conductors and suppressed the work hardening effect, significantly improving the power cyclic lifetime. Additionally, this study conducted chlorination and high-temperature oxidation test to compare the application characteristics of the heavy micro-alloyed copper wires with pure copper wires, through tensile and bending test, as well as electrical property comparisons. Finally, Cu50Ni (50 ppm Ni) wires were selected and nickel ceramic substrates for wire bonding to evaluate module electrical properties and bonding reliability.
In the chloride test, there was no significant pitting corrosion observed in copper wire, and the micro-alloyed copper wire outperformed the pure copper wires in terms of bending lifetime and power cycling performance. In the high-temperature oxidation test, an oxide layer of cuprous oxide formed on the surface of all wires. The pure copper wire exhibited a significant increase in resistance. Notably, the micro-alloyed copper wires had better resistance to oxidation. Regarding wire bonding, the use of Cu50Ni wires and nickel ceramic substrates reduced the diffusion rate of nickel atoms from the substrate to the copper wire, forming a thinner alloy diffusion layer. This prevented electrical degradation and achieved high bonding reliability, especially under higher bonding forces. These findings confirm that micro-alloyed copper wires are suitable for high-power applications.
期刊介绍:
Microelectronics Reliability, is dedicated to disseminating the latest research results and related information on the reliability of microelectronic devices, circuits and systems, from materials, process and manufacturing, to design, testing and operation. The coverage of the journal includes the following topics: measurement, understanding and analysis; evaluation and prediction; modelling and simulation; methodologies and mitigation. Papers which combine reliability with other important areas of microelectronics engineering, such as design, fabrication, integration, testing, and field operation will also be welcome, and practical papers reporting case studies in the field and specific application domains are particularly encouraged.
Most accepted papers will be published as Research Papers, describing significant advances and completed work. Papers reviewing important developing topics of general interest may be accepted for publication as Review Papers. Urgent communications of a more preliminary nature and short reports on completed practical work of current interest may be considered for publication as Research Notes. All contributions are subject to peer review by leading experts in the field.