Investigation of the Spatial Distribution of Deformations in Quartz Piezo Elements by the X-Ray Topography Method

Using X-ray topography, the distributions of deformations in the volume of two types of AT-cut quartz resonators of different sizes were obtained on laboratory and synchrotron X-ray sources. The comparison of X-ray topography data and the amplitude–frequency characteristics of the resonators was used to establish a correlation between the deformation patterns and the features of oscillatory processes for the operating modes and their harmonics, as well as for parasitic modes. A connection between vibrations at parasitic modes and their harmonics, which manifest themselves in an amplitude inhomogeneity, and the topology of the resonators has been found. The applied significance of the obtained results for the development and optimization of new designs of piezoelectric elements and the development of their manufacturing technology is pointed out.