氧气和氮气流量比对 AlCrTaTiZr 高熵氮氧化物薄膜微观结构演变的影响

IF 2.9 3区材料科学 Q2 MATERIALS SCIENCE, COATINGS & FILMS

Coatings Pub Date : 2024-09-18 DOI:10.3390/coatings14091199

Yung-Chu Liang, Ching-Yin Lee, Miao-I Lin, Ting-En Shen, Jung-Fan Hung, Jien-Wei Yeh, Che-Wei Tsai

{"title":"氧气和氮气流量比对 AlCrTaTiZr 高熵氮氧化物薄膜微观结构演变的影响","authors":"Yung-Chu Liang, Ching-Yin Lee, Miao-I Lin, Ting-En Shen, Jung-Fan Hung, Jien-Wei Yeh, Che-Wei Tsai","doi":"10.3390/coatings14091199","DOIUrl":null,"url":null,"abstract":"This study explores the influence of oxygen and nitrogen flow ratios on the microstructure and mechanical properties of AlCrTaTiZr high-entropy oxynitride films. Oxygen flow rates (0%–0.75%) were adjusted while maintaining a fixed nitrogen flow ratio (RN = 15%) to fabricate films with similar compositions. The results show that increasing oxygen flow enhanced hardness through solid solution strengthening and grain refinement, though excessive oxygen caused an amorphous structure and reduced hardness. After annealing at 900 °C, the hardness of all films was further increased. The film with a nitrogen flow ratio 40 times higher than oxygen exhibited the highest hardness of 21.8 GPa, along with superior mechanical performance. These findings highlight the potential of high-entropy oxynitride films for applications requiring high wear resistance and adhesion.","PeriodicalId":10520,"journal":{"name":"Coatings","volume":"9 1","pages":""},"PeriodicalIF":2.9000,"publicationDate":"2024-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Influence of Oxygen and Nitrogen Flow Ratios on the Microstructure Evolution in AlCrTaTiZr High-Entropy Oxynitride Films\",\"authors\":\"Yung-Chu Liang, Ching-Yin Lee, Miao-I Lin, Ting-En Shen, Jung-Fan Hung, Jien-Wei Yeh, Che-Wei Tsai\",\"doi\":\"10.3390/coatings14091199\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This study explores the influence of oxygen and nitrogen flow ratios on the microstructure and mechanical properties of AlCrTaTiZr high-entropy oxynitride films. Oxygen flow rates (0%–0.75%) were adjusted while maintaining a fixed nitrogen flow ratio (RN = 15%) to fabricate films with similar compositions. The results show that increasing oxygen flow enhanced hardness through solid solution strengthening and grain refinement, though excessive oxygen caused an amorphous structure and reduced hardness. After annealing at 900 °C, the hardness of all films was further increased. The film with a nitrogen flow ratio 40 times higher than oxygen exhibited the highest hardness of 21.8 GPa, along with superior mechanical performance. These findings highlight the potential of high-entropy oxynitride films for applications requiring high wear resistance and adhesion.\",\"PeriodicalId\":10520,\"journal\":{\"name\":\"Coatings\",\"volume\":\"9 1\",\"pages\":\"\"},\"PeriodicalIF\":2.9000,\"publicationDate\":\"2024-09-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Coatings\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://doi.org/10.3390/coatings14091199\",\"RegionNum\":3,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"MATERIALS SCIENCE, COATINGS & FILMS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Coatings","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.3390/coatings14091199","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, COATINGS & FILMS","Score":null,"Total":0}

引用次数: 0

摘要

本研究探讨了氧气和氮气流量比对 AlCrTaTiZr 高熵氮氧化物薄膜的微观结构和机械性能的影响。在保持固定氮气流量比（RN = 15%）的情况下，调整氧气流量（0%-0.75%）以制造具有相似成分的薄膜。结果表明，增加氧气流量可通过固溶强化和晶粒细化提高硬度，但过量的氧气会导致无定形结构和硬度降低。在 900 °C 退火后，所有薄膜的硬度都进一步提高。氮气流动比为氧气流动比 40 倍的薄膜硬度最高，达到 21.8 GPa，同时机械性能也更出色。这些发现凸显了高熵氮氧化物薄膜在要求高耐磨性和高附着力的应用中的潜力。

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Influence of Oxygen and Nitrogen Flow Ratios on the Microstructure Evolution in AlCrTaTiZr High-Entropy Oxynitride Films

This study explores the influence of oxygen and nitrogen flow ratios on the microstructure and mechanical properties of AlCrTaTiZr high-entropy oxynitride films. Oxygen flow rates (0%–0.75%) were adjusted while maintaining a fixed nitrogen flow ratio (RN = 15%) to fabricate films with similar compositions. The results show that increasing oxygen flow enhanced hardness through solid solution strengthening and grain refinement, though excessive oxygen caused an amorphous structure and reduced hardness. After annealing at 900 °C, the hardness of all films was further increased. The film with a nitrogen flow ratio 40 times higher than oxygen exhibited the highest hardness of 21.8 GPa, along with superior mechanical performance. These findings highlight the potential of high-entropy oxynitride films for applications requiring high wear resistance and adhesion.

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来源期刊

Coatings Materials Science-Surfaces, Coatings and Films

CiteScore

5.00

自引率

11.80%

发文量

1657

审稿时长

1.4 months

期刊介绍： Coatings is an international, peer-reviewed open access journal of coatings and surface engineering. It publishes reviews, research articles, communications and technical notes. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. There is no restriction on the length of the papers. Full experimental and/or methodical details must be provided. There are, in addition, unique features of this journal: * manuscripts regarding research proposals and research ideas will be particularly welcomed * electronic files or software regarding the full details of the calculation and experimental procedure - if unable to be published in a normal way - can be deposited as supplementary material