环形磁化系统中微波和射频放电的等离子体参数和中性粒子的特征。

IF 1.3 4区工程技术 Q3 INSTRUMENTS & INSTRUMENTATION

Review of Scientific Instruments Pub Date : 2024-08-01 DOI:10.1063/5.0219487

D López-Rodríguez, K Crombé, A Goriaev, J Buermans, A Adriaens, Yu Kovtun, L Dittrich, P Petersson, T Wauters, S Brezinsek

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引用次数: 0

摘要

对环形磁化系统（TOMAS）中的射频和微波放电进行了等离子体参数以及中性粒子能量和通量表征。使用可移动的三重朗缪尔探针研究电子密度和温度，并使用飞行时间中性粒子分析仪测量中性粒子的能量和通量，这是总注入功率和用于产生等离子体的天线频率的函数。实验结果可提供有关壁调节等离子体中低能量中性粒子行为的信息。

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Characterization of plasma parameters and neutral particles in microwave and radio frequency discharges in the Toroidal Magnetized System.

A characterization of plasma parameters and neutral particle energies and fluxes has been performed for radio frequency and microwave discharges in the Toroidal Magnetized System (TOMAS). A movable triple Langmuir probe was used to study the electron densities and temperatures, and a time-of-flight neutral particle analyzer was used to measure the energy and fluxes of neutral particles, as a function of the total injected power and the antenna frequency used to generate the plasma. The experimental results can provide information on the behavior of neutral particles at low energies in wall conditioning plasmas.

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来源期刊

Review of Scientific Instruments 工程技术-物理：应用

CiteScore

3.00

自引率

12.50%

发文量

758

审稿时长

2.6 months

期刊介绍： Review of Scientific Instruments, is committed to the publication of advances in scientific instruments, apparatuses, and techniques. RSI seeks to meet the needs of engineers and scientists in physics, chemistry, and the life sciences.