Effect of Sulfuric Acid Immersion on Electrical Insulation and Surface Composition of Amorphous Carbon Films

Sulfuric acid is a concern for contacts within electronic devices, and the application of amorphous carbon films as thin electrical insulating coatings for small coils requires full investigation of its effects. Five types of amorphous carbon films were fabricated on Si substrates under different deposition conditions using vacuum coating systems. Based on their optical constants (ISO 23216:2021(E)), the films were classified into three types: hydrogenated amorphous carbon (a-C:H), polymer-like carbon (PLC), and graphite-like carbon (GLC). The structure, surface composition, and electrical insulation properties of the films were evaluated before and after immersion in sulfuric acid. Although the PLC and a-C:H showed progression of surface oxidation due to sulfuric acid immersion, none showed obvious changes in their structure or DC dielectric breakdown field strength due to sulfuric acid immersion, proving their stability. Furthermore, the PLC and a-C:H, which had a relatively low extinction coefficient, exhibited excellent insulation properties. Our results suggest that amorphous carbon films can be useful as thin insulating films for small coils that may come in contact with sulfuric acid. Our study offers a valuable tool for general users in the industry to facilitate selection of electrical insulating amorphous carbon films based on optical constants, such as extinction coefficients.