用于研究常压下离子型表面处理和薄膜沉积的真空-超紫外-光离子化室

IF 2.9 3区物理与天体物理 Q2 PHYSICS, APPLIED

Plasma Processes and Polymers Pub Date : 2024-07-05 DOI:10.1002/ppap.202400103

Kerstin Sgonina, Christian Schulze, Alexander Quack, Jan Benedikt

{"title":"用于研究常压下离子型表面处理和薄膜沉积的真空-超紫外-光离子化室","authors":"Kerstin Sgonina, Christian Schulze, Alexander Quack, Jan Benedikt","doi":"10.1002/ppap.202400103","DOIUrl":null,"url":null,"abstract":"The vacuum‐ultraviolet‐photoionization chamber was constructed to allow controlled ion generation and well‐defined surface treatment with these ions at atmospheric pressure. It utilizes atmospheric helium plasma as a photon source and separates the ion generation from the plasma by an aerodynamic window. The ions are guided to the grounded substrate by a weak electric field, while the diffusive transport of neutrals is reduced by a helium gas flow along the substrate. Ionic species and the absolute ion flux were determined in the substrate region. Ion‐based thin film deposition using a precursor was investigated as a model process. The proposed system enables future investigation of e.g. the isolated interaction of ions with biological substrates.","PeriodicalId":20135,"journal":{"name":"Plasma Processes and Polymers","volume":"25 1","pages":""},"PeriodicalIF":2.9000,"publicationDate":"2024-07-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Vacuum‐ultraviolet‐photoionization chamber for the investigation of ion‐based surface treatment and thin film deposition at atmospheric pressure\",\"authors\":\"Kerstin Sgonina, Christian Schulze, Alexander Quack, Jan Benedikt\",\"doi\":\"10.1002/ppap.202400103\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The vacuum‐ultraviolet‐photoionization chamber was constructed to allow controlled ion generation and well‐defined surface treatment with these ions at atmospheric pressure. It utilizes atmospheric helium plasma as a photon source and separates the ion generation from the plasma by an aerodynamic window. The ions are guided to the grounded substrate by a weak electric field, while the diffusive transport of neutrals is reduced by a helium gas flow along the substrate. Ionic species and the absolute ion flux were determined in the substrate region. Ion‐based thin film deposition using a precursor was investigated as a model process. The proposed system enables future investigation of e.g. the isolated interaction of ions with biological substrates.\",\"PeriodicalId\":20135,\"journal\":{\"name\":\"Plasma Processes and Polymers\",\"volume\":\"25 1\",\"pages\":\"\"},\"PeriodicalIF\":2.9000,\"publicationDate\":\"2024-07-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Plasma Processes and Polymers\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1002/ppap.202400103\",\"RegionNum\":3,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"PHYSICS, APPLIED\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Plasma Processes and Polymers","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1002/ppap.202400103","RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"PHYSICS, APPLIED","Score":null,"Total":0}

引用次数: 0

摘要

真空-超紫外-光离子化室的建造是为了在大气压力下控制离子的产生并用这些离子进行明确的表面处理。它利用大气氦等离子体作为光子源，并通过空气动力学窗口将离子生成与等离子体分离。离子在弱电场的引导下到达接地基底，而中性物质的扩散传输则通过沿基底的氦气流来减少。测定了基底区域的离子种类和绝对离子通量。作为一个模型过程，研究了使用前驱体的离子薄膜沉积。所提出的系统有助于今后研究离子与生物基质之间的相互作用。

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Vacuum‐ultraviolet‐photoionization chamber for the investigation of ion‐based surface treatment and thin film deposition at atmospheric pressure

The vacuum‐ultraviolet‐photoionization chamber was constructed to allow controlled ion generation and well‐defined surface treatment with these ions at atmospheric pressure. It utilizes atmospheric helium plasma as a photon source and separates the ion generation from the plasma by an aerodynamic window. The ions are guided to the grounded substrate by a weak electric field, while the diffusive transport of neutrals is reduced by a helium gas flow along the substrate. Ionic species and the absolute ion flux were determined in the substrate region. Ion‐based thin film deposition using a precursor was investigated as a model process. The proposed system enables future investigation of e.g. the isolated interaction of ions with biological substrates.

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来源期刊

Plasma Processes and Polymers 物理-高分子科学

CiteScore

6.60

自引率

11.40%

发文量

150

审稿时长

3 months

期刊介绍： Plasma Processes & Polymers focuses on the interdisciplinary field of low temperature plasma science, covering both experimental and theoretical aspects of fundamental and applied research in materials science, physics, chemistry and engineering in the area of plasma sources and plasma-based treatments.